| Power | - 208-240VAC, 3 phase, 50/60Hz
- 12kW
|
| Vacuum Chamber | - Electropolished water-cooled stainless steel 304 vacuum chamber, ID Ø320×304 mm
- Water-cooled load-lock door
- Two water-cooled electric feedthroughs
- 6-layer all metal thermal reflection sheaths
- Molybdenum sample stage
- DN100CF port for vacuum generation
- DN100CF manual gate valve
- DN40KF port for ionization gauge
- DN16KF port for convection vacuum gauge
- Two 1/4" bellow-sealed needle valves (VCR) for gas inlet and outlet
- Ultimate vacuum <1e-6 torr by 300L/s turbopump
- Max working pressure <1.5 bar
|
Heating Unit
| - Molybdenum heating coils
- Heating area Ø150×172 mm
- Max sample size Ø100×120 mm at ±8°C temperature uniformity
- Mo sample stage 120×60 mm
- Type K thermocouple
- Maximum working temperature <1400°C
- Maximum heating rate <10°C
|
Temperature Control
| - Eurotherm EPC 3000 series
- PID automatic temperature control loop
- 28-segement programmable temperature profile
- Temperature accuracy: ±1°C
- RS485, MODBUS RTU for remote communication
|
| Vacuum Gauge (Optional) | - InstruTech IGM402 hot cathode ion gauge (1.00E-09 Torr to 1,000 Torr)
- InstruTech convection pressure gauge
|
Water Chiller (Optional)
| Power Supply: AC220V 50Hz Power: 3.5KW Working Current: 3.4~18.1A Cooling Capacity: 26826 Btu/h Water Tank Capacity: 40L Inlet and Outlet: Rp1" Maximum Pump Water Flow Rate: 75L/min
|
Vacuum Pump (optional)
| - 260L/s Pfeiffer Vacuum Turbomolecular pump
- 240L/min rotary vane backing pump
- 200L/min Pfeiffer Vacuum dry scroll pump
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| Dimension | |
| Weight | |
| Compliance | - CE certified
- NRTL or CSA certification is available upon request at the extra cost
|
| Warranty | - One-year limited warranty with lifetime support
|
