Furnace structure
| • Double layer steel case with two cooling fans to ensures low surface temperature.- • Energy saving high purity fibrous alumina insulation.
- • One flange is supported by sliding rail to make sample loading /unloading easy; another seal flange
is installed with a digital vacuum gauge.
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Power Consumption | 7 KW Max (power cord is included without plug) |
Input Voltage
| AC 208-240V Single Phase, 50 or 60 Hz (Please select the right pump in the option bar based on your working requirement) (40A breaker required)
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Maximum Temperature | 1200 oC |
Continuous Temperature | 1100 oC |
Max. Heating Rate | ≤ 20 oC /min |
Heating Zone Length
| • Three zones: (900mm, 36" in total)- º Zone 1: 229mm (9")
- º Zone 2: 457mm (18.0")
- º Zone 3: 229 mm (9")
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Constant Temperature Zone
| • If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC.- • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a
temperature discrepancy of +/- 1oC.
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Temperature Accuracy | +/- 1oC |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers
| • Three precision temperature controllers to control three zones separately.- • PID automatic control with 30 programmable segments for precise control of heating rate, cooling
rate and dwell time. - • Built-in overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • Optional:
- º The furnace may be operated by PC by installing three control modules.
Please order the MTS-02 control modules at extra cost. - º If you order the PC control module together with the furnace, we will install and test it
before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)
| • 1 heating channel- • 1 programs of 8 or 24 segment
- • Alarm Relay: Form 'A' and Form ‘C’ built-in
- • Digital Communications: RS485
- • Temperature Accuracy: ± 0.1ºC
- • Recipes: Using a PC tool recipes can be created that can be used to change the operating
parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Vacuum Sensor & Display
| • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gasses.- • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
range (10^-5 ~ 1000 torr).
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Oxygen Monitoring (not included)
| An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Vacuum Pump
| • 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10-2torr. Stainless steel hose tube is included for connecting to tube furnace.- • SS vacuum pipe & ball valve with KF25 adaptor guarantee a ^-2 torr vacuum.
- • Optional: You may achieve 1.0E-5 Torr vacuum by turbo pump ( click pic.1 to order).
- • Optional: For precise control of the vacuum pressure, we recommend you choose our turn-key
solution EQ-VPC-MV (Pic.2). This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Pic.1 Pic. 2
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Tube Size and Flange
| • 130 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included.- • Vacuum flanges with both valves and pressure gauge are included.
- Click to order spare click here to choose a crucible
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Sliding Rail
| 800mm long sliding rail is installed with one end flange to make loading & unload sample easy.
- • 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal
(see bottom left picture) - • 5" Quartz tube can accommodate 4" quartz wafer boat without holder (see bottom right picture)
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Mobile Cart & Flow Meters
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Dimensions | 1080 X 430 x 600mm |
Net Weight | ~70 kg |
Shipping Dimensions | 65x45x35" (x2 pallets) |
Shipping Weight | 540 lbs |
Warranty | One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional)
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Compliance
| • UL ready- • CE / MET / CSA Certification is available upon request, additional charges will apply
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Application Notes
Click here to learn the installation of a gas regulator
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Operation Instructions | |