Furnace Structure
|
• Features a unique Triple Channel source feeding system which drives crucibles with
evaporation material through the vacuum or atmosphere controlled tube, suitable for
Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programmed.- • Three independent temperature controllers to control each zone's temperature.
- • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- • High purity fibrous alumina insulation for maximum energy saving.
- • The special refractory coating on liner and heating element help increase furnace service life.
- • Split cover with Interlock protection, cut the power if door open during furnace heating process.
  
|
| Power Requirement | - • Single Phase 208~240VAC, 50/60Hz, 10KW (70Amp circuit breaker is required)
|
| Heating Zone Length | - • Three zones: each zone length is 11.8" (300 mm)
|
| Temperature Range | 100~1100°C (Continuous); 1200°C (<1 hour) |
| Max. Heating Rate | ≤ 10°C /min |
Sequential Source Feeding System |
• Three thermocouples are connected to the three small quartz tubes from the left flange.
The stepper motor drives the tube to travel through the large tube together with the
thermocouple for real-time temperature monitoring.- • Three quartz tubes can be simultaneously placed into the source feed system and sequentially
delivered to the quartz tube under vacuum or inert gas conditions (or co-deposition 3 sources
at the same time, please refer to bottom pictures for details) - • Each feeding channel has independent gas inlet and flow-control.
- • Dimension of source crucible: 18mm x 18mm
  
gif.1 gif.2 pic.1
|
Sample Crucible Movement Control |
• The crucible moving speed and distance are controlled by handwheel.- • Crucible traveling distance: 300mm.
- • Crucible Dimension: 80mm x 32mm x 13mm (pic.1)
- • Slidable Crucible Baffle Dimension: 20mm x 20mm (gif.1)
- • Recommended Sample size: 20mm x 20mm
  
pic.1 pic.2 gif.1
|
Temperature Controllers |
• 3 UL listed Eurotherm digital controllers with ±1°C accuracy temperature control of heating rate,
cooling rate and dwell time.
|
| Heating Element | Fe-Cr-Al Alloy doped by Mo |
Tube Accessories |
• One fused quartz tube (130mm O.D. x 122mm I.D. x 1200mm L) is included.- • Three fused quartz tubes (25mm O.D. x 21mm I.D. x 1200mm L) is included.
|
Vacuum Pump
| |
Gas Flow Control System
| |
1350C In-Situ Evaporator
 |
• The temperature controlled thermal evaporator designed for In-situ evaporating most metallic
and organic materials up to 1350 ºC.- • The optional magnetic fluid seal is an inline swivel which prevents gas/vacuum / electrical lines
twisting in the event of tube & flange rotation. - • The KF50 rotatable flange had a wide range adaptability to vacuum chambers and tube
flanges.
|
Dimensions
|
 4000mm(L) x 600mm(W) x 1500mm(H)
|
Warranty |
One-year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
|
Compliance |
• CE Certified- • UL Certified for extra costs
- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
(please click marks below to learn details)
    
|
Application Notes
Click here to learn the installation of a gas regulator.
| |
Operation Instructions
|
Feature Demonstration Installation How to operate the furnace
  
|
