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MgO Substrates(100)
MgO (100) Substrate 2.0"x2.0"x0.5mm , 1SP
- Specifications of MgO Substrate
- Size
- 2.0"mm x 2.0"mm x 0.5mm +/- 0.05 mm
( choose 1.0 mm thick at extra cost )
- Orientation
- (100) +/-0.5 Deg
- Polish
- One side EPI polished by CMP technology with minimum sub-surface damage.
- Surface finish (RMS or Ra)
- < 10A
- Packing
- The substrate is packed with 100 grade clean plastic bag under 1000 class clean room.
- Precautions
- MgO is sensitive to moisture, and must be stored in vacuum box.
- Crystal Structure
- Cubic, a=4.216 Å
- Growth Method
- Special Arc Melting
- Typical Impurity (ppm)
-
Ca <= 40,
Al <= 15,
Si <= 10,
Fe <= 50,
Cr <= 10,
B <= 5,
C <= 10
- Crystal cleavage plane
- <100>
- Thermal expansion
- 12.8 x10-6/ oC
- Optical Transmission
- •> 90% @ 200 ~ 400 nm
•> 98 % 500 ~ 1000 nm
- Crystal Prefection
- No visible inclusions and micro cracking, X-Ray rocking curve available
- Standard MgO Crystal Substrates Specification
- Orientation
- •<100> ±0.2o
•<110> and <111> ±0.5o
- Polished surface
- EPI polished on one side or two sides to Ra < 10 Å
- Standard Thickness
- •For ground blank: 1.0 mm ±0.1mm
•Polished substrate: 0.5 mm ±0.05mm •As-cleaved substrates: 0.8 mm ±0.2 mm
- Standard Crystal Substrate
-
as-cut |
as polished |
as-cleaved |
2”x2”x 1.0 mm f2” x 1.0 mm 1”x1”x 0.8 mm f1” x 0.8 mm 10 x10x 0.7 mm |
2”x2”x 0.5 mm f2” x 0.5 mm 1”x1”x 0.5 mm f1” x 0.5 mm 10 x10x0.5 mm |
10x10 x 0.8 mm 8 x 8 x 0.8 mm 5 x 5 x 0.8 mm | Special size and orientation are available upon request
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Working days : Monday to Saturday
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