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YSZ substrates (111)
YSZ (111) 10x10x 1.0mm , 1SP,
- Single crystal YSZ Substrate
- Size
- 10 x 10 x 1.0 mm +/-0.05 mm
- Orientation
- (111) +/-0.5 Deg
- Polish
- One side polished by CMP technology .
- Surface roughness
- < 5 Å by AFM
- Packing
- The substrate is packed in 100 grade clean plastic bag under 1000 class clean room
- Typical Physical Properties
- Chemical Formula
- •Y2O3 stabilized ZrO2,
•8 %mole Y2O3
- Crystal Structure
- •Cubic,
•Face Centered,
•CaF2 type
- Thermal Expansion Coeff
- 10.3 ppm / oC
- Crystal Growth Technique
- Flux Technique
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