RTP Furnaces

 
 
 
1200°C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP- OTF-1200X-S-DVD

1200°C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP- OTF-1200X-S-DVD

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Product Name 1200°C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP- OTF-1200X-S-DVD
Sale Price Call for Price
Product Code OTF1200XSDVD
Quantity 수량증가수량감소
상품 옵션
 

OTF-1200X-S-DVD is a compact megnet driven sliding 2" tube furnace with a max. working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD)  or rapid thermal processing (RTP) under various atmosphere for 2D material growth.  


SPECIFICATIONS:



Furnace Feature



   


  •      •  One high thermal conductivity Alumina flat sample holder (2"Lx1"W)  is fixed on K type sample,
            and the thermal couple with the sample holder can be moved  inside quartz tube driven by a
            magnet manually to find desirable temperature position inside tube for evaporation or
           deposition.
     

  •      •  One NIST certified precision temperature monitor is connected to thermal couple and sample
              holder via a feedthrough on the vacuum flange.

  •      •  One magnet is embedded inside thermal block, and another magnet is placed outside tube.
            move the outside magnet can move the sample holder with thermal couple inside tube in or out

  •      •  30 segment programmable temperature controller is built in furnace to set up Max. working
            temperature up to 1200oC at center of furnace

  •      •  One small quartz crucible is included, which can be used to contain evaporation material or
             please wafer on top for deposition based on your application.
       


Furnace Power

  •      •  110VAC or 208 - 240 VAC, 50/60Hz   (Please confirm voltage when place order )

  •      •  1.5 KW

Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min

Heating Zone



  •      •  Heating Zone Length:  8" (200mm), single zone. The following picture shows the temp.
            distribution across the heating zone, please click to enlarge.

  •      •  Constant Temp. Zone:    2.3" (60mm)  (+/-1°C) @ 1000 °C

  •      •  You shall measure furnace temperature profile for your own application before making film
             growth.
         

Temperature Controller

       

  •      •  PID automatic control via solid state relay with 30 steps programmable

  •      •  Built in Over Temperature and Thermocouple Failure Protection

  •      •  Optional:  The furnace may be operated by PC with installing a control module.
            Please order a
    MTS02-B control module at extra cost.      
           
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo

Tube Size

  •      •  2" quartz tube
     (50mm O.D x 44mm I.D x 1000mm L)

  •      •  Two fibrous ceramic tube blocks are included for blocking heat radiation from tube chamber.
             (Ceramic blocks must be fully inserted into the furnace chamber before heating)

  •      •  One small quartz boats  is included for placing sample or evaporation materials.

                 1       click here to choose other size crucible

 
Vacuum Flanges
  
 

2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port(click picture below to see details )

   

Vacuum Level
10-2torr (by mechanical pump)
  
Fitting Ports
      &
Optional Parts

  •      •  You may need a vacuum valve at the vacuum port end ( click picture left to order )

  •      •  You may consider to order  quick connecting flange at extra cost.

  •      •  You may order multi-channel gas delivery system for DVD or CVD operation.

  •              


Dimensions




     •  With lid close: 1055mm (L) × 300mm(W) × 400mm(H)
     •  With lid open: 1055mm (L) × 300mm(W) × 560mm(H)
Net Weight
22 Kg
Shipping Package Size
48''(L) x 24''(W) x 28''(H)
Shipping Weight
120 lbs

Warranty

One year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty.


Laptop, software & WiFi Control(Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
             immediate use.

  •      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature
             profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

  •      •  A wireless remote control provides up to 300 meters operating range.

  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.

  •      •  Note:
           The software is only compatible with MTI’s Yudian Temperature Controller

              



Compliance

  •      •  CE Certified

  •      •  All electric components ( >24V) are UL / MET / CSA certified

  •      •  The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. 
            ( please click marks below to learn details )

                                


Application Notes



Click here to learn the installation of a gas regulator

  •      •  Tube furnaces with quartz tubes are designed for using under vacuum and low pressure
            <
    0.2 bar / 3 psi / 0.02 MPa

  •      •  Attention: A two stage pressure regulator must be installed on gas cylinder to limit
            the pressure to below 3 PSI for safe operation.
     

             Click here to learn the installation of a gas regulator.

  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
            used up to 1000°C

  •      •  The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal
            shocks to the tube

  •      •  How to set up ceramic tube and vacuum flange for MTI tube furnaces.

  •      •  If you would like cooling sample in vacuum at eas,  please consider below modle


  •             Tube Furnace with Internal Travel Mechanism


Operation Instructions