Split Tube Furnace
| • 208 - 240 VAC, 50/60Hz, 1.2 KW max. power consumption- • Working temperature: 1100°C continuous and 1200°C Max.
- • 2" quartz tube (50mm O.D x 44mm I.D x 450mm L) with vacuum sealed flanges.
- • Optioanl: you may choose dual zone tube furnace at Pic below right at extra cost to creat higher
thermal gradient or longer constant temperature zone
-- two zone furnace
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Temperature Control
| • PID automatic control via solid state relay with 30 steps programmable
- • Built in Over Temperature and Thermocouple Failure Protection
- • +/-1°C accuracy
- • K-type thermal couple
- • Heating zone length: 200mm ( 8")
- • Constant temperature zone: 60 mm (+/-1°C @ 1000 °C )
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Vacuum Sealing
| • 2" quick clamp flange with 1/4'' fittings, vacuum gauge as well as needle valve on the right side- • The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
- • Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve
- • Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by turbopump
(click picture to see details )
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Internal Traveling Mechanism & PLC Control Pannel | • One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. (click pic.1 to view)- • A step motor can drive the crucible inside the tube from the heating center to the right end of the
furnace, 100 mm max. - • Touch screen control panel allows travel distance setting and temperature display of crucible
position (click pic.2 to view) - • Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at
additional cost ) - • A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple (click pic.3 to view).
- • AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request,
additional customization fee will apply (click pic.4 to view).
Pic.1 Pic.2 Pic.3 Pic.4 Pic.5
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Max. Heating & Cooling Rate
| The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone. The typical ramp/cool rate is listed in below:
Heating Rate: 10°C/sec (150°C - 250°C); 7°C/sec (250°C - 350°C); 4°C/sec (350°C - 500°C); 3°C/sec (500°C - 550°C); 2°C/sec (550°C - 650°C); 1°C/sec (650°C - 800°C); 0.5°C/sec (800°C - 1000°C); | Cooling Rate: 10°C/sec (950°C - 900°C); 7°C/sec (900°C - 850°C); 4°C/sec (850°C - 750°C); 2°C/sec (750°C - 600°C); 1.5°C/sec (600°C - 500°C); 1°C/sec (500°C - 400°C); 0.5°C/sec (400°C - 300°C); | |
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Optional Parts | • You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )- • Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
- • You may order multi-channel gas delivery system for DVD or CVD operation ( Pic 4)
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Dimensions
| ( click Pic to see details )
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Warranty
| One year limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty)
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Laptop, software & WiFi Control(Optional)
| • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.- • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile,
manage heat-treatment recipe, record and plot data for MTI furnaces. - • A wireless remote control provides up to 300 meters operating range.
- • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more
information. - • Note: The software is only compatible with MTI’s Yudian Temperature Controller
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Compliance
| • CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
( please click marks below to learn details )
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Warning
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up
to 1000°C
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Operation Video and Instructions |
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Application Notes | This multi-functional furnace is suitable for the applications in below:
- • RTE: Crucible loaded with evaporation material is placed in the center of the furnace, move sample
holder to a downstream position with appropriate temperature where the deposition takes place. - • HPCVD: Similar setup as RTE, we also introduce reactant gas to mix with evaporation vapor and
make deposition - • Horizontal Bridgman Crystal Growth: Load material and seed into a crucible and place it in the
center of the furnace. Move the crucible at the desired speed to grow single crystal under suitable thermal gradient. - • If you have any question and suggestion, please contact us before purchasing
- • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most
applications. By using the graphene transfer tape, the residue can be low - • For Horizontal directional crystalization (HDC), you may use a gas feedtrough as pic below:
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