GSL1100X-PJF is a compact Atmospheric Plasma Jet-Flow ( so-called Plasma Beam, Plasma Pen) system for surface Treatment, which consist of RF generator, flexible gas delivery pipe and plasma beam head. The plasma jet flow can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc. It is an excellent tool for cleaning wafer surface before epitaxial or optical fiber before welding to obtain higher quality. This device also may be used for studying atmosphere pressure CVD.