Compact Structure |
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Input Power | • Single-phase 220 VAC 50 / 60 Hz- • 2000 W (including a vacuum pump and water chiller)
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Source Power
| • Three sputtering power sources are integrated into one control box (Click picture below to see detailed specs)
- º DC source: 500 W power for coating metallic materials
(Pic 1) - º RF source: 300 W power, 13.56 MHz frequency for
coating non-conductive materials (Pic 2)
-- Pic 1 -- Pic 2
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Magnetron Sputtering Head
| • Three 2" Magnetron Sputtering Heads with water cooling jackets and shutters are included (Click 1st pic from left)
- º Target size requirement: 2" diameter
- • Customized coater: Two DC - One RF; Two RF - One DC;
Three DC; Three RF (Please select from Product Options)
- • Optional: 148 cm RF cable can be ordered at extra cost for
replacement (Click the 1st pic from right to order)
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Vacuum Chamber
| • Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel- • Viewport: Two pieces of 100 mm Dia. glass. One fixed;
one detachable for cleaning and replacement - • Hinged type lid with pneumatic power pole allows easy target
change
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Sample Stage
| • The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover- • Sample holder size: 140 mm Dia. for. 4" wafer max
- • Rotation speed: 1 - 20 rpm adjustable for uniform coating
- • The holder temperature is adjustable from RT to 500 °C max
(2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller
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Gas Flow Control
| • Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases
- º Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel
- • Air inlet valve is installed for vacuum release
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Vacuum Pump Station
| • A mobile pump station is included. The sputtering coater can be placed on top of the station- • High-speed turbopump at speed 80L/S is combined with a
two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed
- • Standard vacuum level connected with chamber: < 4.0E-5 Torr.
- • Optional at extra cost
- • If choose a 150L/S high-speed turbopump, the vacuum can
reach 10-6 torr with the chamber 。
- • For the ultra-high vacuum up to 10^-7 torr, 700S/L turbopump
is needed
- 150L/S high-speed turbopump
700L/S high-speed turbopump
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Water Chiller
| • One digital temperature-controlled recirculating water chiller is included. (Click picture to see details)
- º Refrigeration range: 5~35 °C
- º Flow rate: 16 L/min
- º Pump pressure: 14 psi
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Optional | • Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å
- • Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is
available at extra cost
- • Various 2” oxide and metallic targets are available upon request
at extra cost. Silver epoxy and copper backing plates can be ordered at MTI
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Overall Dimensions
| Lid closed: 48" × 28" × 32" Lid open: 48" × 28" × 37"
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Net Weight of Coater | |
Shipping Weight & Dimensions
| • Total 3 Pallets- • 365 lbs, 48" x 40" x 45"
- • 390 lbs, 48"x 40" x 49"
- • 210 lbs, 48" x 40"x 30"
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Compliance
| • NRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.
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Warranty | - • One year's limited warranty with lifetime support
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Operation Instruction
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Application Note
| This coater may be placed into a standard glovebox with modification for thin-film battery research
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