Furnace structure
| • Furnace, two temperature controllers, two-channel gas flowmeters are integrated into a mobile aluminum alloy frame.- • The chamber is made of high purity fused quartz tube with the dimension of 11" OD/10.8"
ID x 9" H. - • The vacuum flanges are made of Stainless Steel 316 and lifting by the electric motor.
- • Two 5"x5" IR heating plates and the spacing are adjustable.
- • Top sample holder is rotatable at the speed 0 - 7 RPM.
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| • Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.- • Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle
valves. - • The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of
10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately). - • One digital vacuum gauge is installed on the top flange.
- • Precision anti-corrosion digital vacuum gauge is in standard package(Since 2016.03.24).
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Heater and Sample Holder
| • Two independently controlled heaters with manually adjustable gap from 2 - 30 mm.
- • 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.
- • Heaters are made of stainless steel with water cold jacket to reduce heat radiation and are
capable of fast cooling. - • 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.
- • One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included
(place on the back of the substrate to make it heat uniformly). - • A 58L/min circulating water chiller is included for saving water source
( click the picture below to see detailed specs). - • Top sample holder is rotatable at adjustable speed 0 - 7 RPM
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Temperature Controller
| • Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters.- • Each controller has a PID autotune function to protect heaters from overshooting and an alarm
function to prevent overheating from damaging the thermal couples. - • PC communication interface & software are installed for (click the picture below for details)
recording temperature profile shown as below.
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Working Temperature
| • The maximum temperature for each heater: ≤ 800ºC.- • The maximum temperature difference between the two heaters: ≤ 300ºC depends on the spacing
between two heaters: - º Spacing 30mm Max. temp difference: 315ºC @ heating bottom only
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Heating & Cooling Rate | • Heating: < 8ºC/s ( heating single heater only )- • Cooling: < 10ºC/s (600 - 100ºC) Max.
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Thermal Couple | Two K-type thermal couples are installed on top and bottom heaters separately. |
Working Voltage | 208 - 240VAC, single-phase, 50A air breaker |
Power Requirement | 10 KW total |
Dimensions
| ( click pic to see dimension ) |
Shipping Weight & Dimension
| - • Two pallets: 525 lbs and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension
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Optional
| • One vacuum pump is required. Please order separately by clicking the first picture from the left below. The vacuum level can reach ≤ 10E-2 torr by a mechanical pump. - • If using corrosive gas, please use a cold trap or anti-corrosive dry pump as in picture 2-3 at extra
cost. - • You may choose digital MFC gas delivery system by clicking the first picture from the right below.
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Warranty | One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty).
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Compliance | • CE Certified- • UL / MET / CSA Certification is available upon request, additional charges will apply.
- • Temperature controller is MET and CE Certified.
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Operation Instructions |
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Application Notes & Warnings
| • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • The foot-stand of this furnace is designed for short-distance hauling on the even surface
(without pits or bumps) only.
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References (Please click right to see related articles) | |