Plasma Enhanced CVD Tube F...

5'' PECVD Split Tube Furnace (1200ºC Max.) with Vacuum Pump Station - OTF-1200X-5L-PE

5'' PECVD Split Tube Furnace (1200ºC Max.) with Vacuum Pump Station - OTF-1200X-5L-PE

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Product Name 5'' PECVD Split Tube Furnace (1200ºC Max.) with Vacuum Pump Station - OTF-1200X-5L-PE
Sale Price Call for Price
Product Code OTF1200XPELV5
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(Upgrade to Eurotherm Temp. Controller)

Personalization

 
OTF-1200X-5L-PE is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.
(item number has been updated from OTF-1200X-5L-I-PE since March 2019)

Specifications:


Single Zone 1200°C Split Tube furnace




  •      •  Max 1200ºC, and for 1100ºC continuous heating
  •      •  Programmable precision digital temperature controllers with 30 segments.
  •      •  Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm
  •      •  Input power: 208 – 240V AC input, single phase at max. 7KW.
  •      •  Vacuum sealed flanges are included for immediate use.
  •      •  Optional:  three-zone furnace with 24" heating zone can be replaced at extra cost
             ( click Pic 2 to review specs )

  •                        


Plasma RF Power S
upply

 
     

  •      •  Output Power:          5 -300W adjustable with ± 1% stability
  •      •  RF frequency:          13.56 MHz ±0.005% stability
  •      •  Reflection Power:     200W max.
  •      •  Matching:                Automatic
  •      •  RF Output Port:       50 Ω, N-type, female
  •      •  Noise:                    <50 dB.
  •      •  Cooling:                  Air cooling.
  •      •  Power:                   208-240VAC, 50/60Hz
  •      •  Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube 
                                           by changing flange



Pressing Tube

  •      •  Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included.  Click Pic 1 to order spare
  •      •  5" SS vacuum flange with valve and K25Vacuum port is included
  •      •  One Anti-corrosive Pressure Gauge is installed on the flange
    •          º  3.8x10-5 to 1125 Torr measurement range
    •          º  Anti-corrosive, gas-type independent
    •          º  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure
                  detection
    •          º  Fast atmospheric detection eliminates waiting time and shortens process cycle
    •          º  We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge
                  which is sufficient for 30-40 hrs battery life per charge.

                 
       
         


 
 Vacuum Pump and valve
 

  •      •  EQ-FYP-Pump
     is installed inside the heavy-duty mobile cart.
  •      •  One Cold Trap for Recovering Condensables is included
  •      •  KF25 adapter and stainless steel pipe are connected between the pump and tube flange with
            precision ball valve for user's plug and immediately use.
  •      •  10E-2 Torr vacuum can be achieved inside the processing tube

  •           


Temperature Controller

  •      •  MET certified 30 programmable segments for precise control of heating rate, cooling rate
            and dwell time.
  •      •  Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  •      •  Over-temperature protection and alarm allows for operation without attendant(s).
  •      •  +/- 1 ºC temperature accuracy.

  •      •  RS485 Communications Port.
    •          º  Advanced Temperature Control (Optional)
    •          º  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15"
                  laptop package is available at the options bar.
                 Click for the detail information about the MTS02-Y software kit.
    •          º  You may upgrade the temperature controller to the Eurotherm 3504 Temperature
                 Controller
       which is fully compatible with LabVIEW. This package includes a
                   Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a
                   software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature
                   controller.
       

  •                                 


Optionals
                         


Dimensions

  •      •  Furnace: 1100 X 450 x 670 mm
  •      •  Net weight: 220 lbs
  •      •  Shipping weight: 350 lbs


Warranty

One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)


Laptop, software & WiFi Control (Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
             immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature
             profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.
  •      •  Note:
            The software is only compatible with MTI’s Yudian Temperature Controller

               


Compliance

  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing
            system, vacuum system, and plasma generator
  •      •  The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.
          ( please click marks below to learn details )

                


Operation Instruction


       


Warning


Click here to learn the installation of a gas regulator

  •      •  An operator should Keep safe distance >1 meter away from the Plasma Generator & its
            furnace chamber when
     the plasma is activated. 
    The operator shall wear RF protective garments
            when continues operation at a close distance (< 1 meter)
     with the plasma is required.
  •      •  It is highly recommended to shield the furnace in an RF protective fume hood. We recommend
            you prepare an RF Detector to monitor RF power all the time.

  •      •  The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2
            bars / 3 psi / 0.02 MPa
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
           the pressure to below 3 PSI for safe operation.
     
            Click here to learn the installation of a gas regulator.
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
            used up to 1000°C
  •      •  The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
             shocks to the tube
  •      •  MTI reserves right to modify PECVD design at  any time without notice but promise that quality
             will meet the specifications above



Shipping Dimensions

  •      •  Pallet #1: 48" x 40" x 60",
    Pallet #2: 48" x 40" x 40", Pallet #3: 48" x 40" x 40",  
            Pallet #4: 48" x 40" x 40"

Total Shipping Weight500 kg (1100 lbs)