Furnace Features
(optional)
| • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.- • Heated by shortwave IR tube lamps for fasting heating
- • Two heating zones, 195 mm each, total 390 mm in length for HPCVD
- • The sample holder is slidable in inside retractable bellows, which can achieve fast heating or cool
under vacuum or controlled atmosphere ( optional) - • Vacuum flanges and the digital vacuum gauge are installed for immediate use.
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Power | • AC 208-240V, single-phase, 50/60 Hz- • MAX 24 KW, 100 A power supply required.
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Heating Element
| • 16 pcs 1.5 Kw Halogen light tube, ( Dia. =10mm, L=390mm )- • Standard working life: 2000 hrs. ( depends on heating rate )
- • The halogen light tube is consumable. Please click the picture left to order spare.
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Max. Temperature | • 900°C max (< 10 minutes )- • 800°C (< 30 minutes )
- • 600°C ( continuous )
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Temperature Accuracy | |
Max. Heating Rate | • RT ~ 800ºC: 50 ºC/s- • 800ºC ~ 900ºC: 10 ºC/s
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Max. Cooling Rate | • 60 ºC/min under 200 mTorr environment
- • 117 ºC/min under atmospheric pressure
- • 10 °C/min slowest
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Process Tube Size | • High purity fused quartz tube- • Φ110 (OD) × Φ106 (ID)× 740 (L) mm
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Sliding Rails | • Dual sliding rails made of Cr plated steel- • Sliding rail length: 400 mm
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Thermocouple
| • Two K type, 1/4" Dia x 24" length
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Temperature Controller
| • Two temperature controllers for controlling two zones independently via SCR- • PID automatic control with up to 30 programmable segments for precise control of heating rate,
cooling rate and dwell time. - • Built-in overheating & thermocouple broken protection.
- • Over-temperature protection and alarm allow for operation without attendant(s).
- • • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • PC Control:
- º An MTS-02 control module is included for PC control on this furnace.
- º The new version of PC module is now compatible with Lab View 05/08/2014
- º A laptop PC can be ordered for $500 together with the furnace. We recommend ordering
a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here
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Vacuum Flanges
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Vacuum Level
| • Limited by the vacuum pump- º 10^-2 torr can be achieved by the mechanical pump
- º 10^-4 torr can be reached by molecular pump
- • The pump is not included. ( please click the picture below to order )
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Water Chiller (optional)
| • Cooling water is required for the flange set.- • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- • We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system
(please order separately at related products below).
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Dimensions
| 1000mm×540mm×800mm
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Net Weight | |
Shipping Weight | |
Warranty
| • One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control (Optional)
| • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.- • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
profile, manage heat-treatment recipe, record and plot data for MTI furnaces. - • A wireless remote control provides up to 300 meters of operating range.
- • The above features are available upon request at an extra cost (up to $1,000). Please contact us
for more information. - • Note: The software is only compatible with MTI’s Yudian Temperature Controller
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Compliance
| • CE Certified- • NRTL(UL61010) or CSA certification is available upon request at extra cost.
( please click marks below to learn details )
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Application Notes
Click here to learn the installation of a gas regulator
| • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
shocks to the tube - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used
up to 1000°C - • Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- • Quartz tubes should be replaced after every 10th use to ensure the best performance.
- • Samples should never be placed on the tube directly; please order crucibles and boats from here.
- • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most
applications. By using the graphene transfer tape, the residue can below.
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Operation Instructions | |