Plasma/ UO Cleaners

Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6

Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6

기본 정보
Product Name Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6
Sale Price 24,800,000
Product Code PCE6
Quantity 수량증가수량감소
상품 옵션
 
EQ-PCE-6 is medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber.  It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.  If you don't have experience with plasma surface cleaning, please refer to the articles as the follows:

  •      •  McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
  •      •  Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
  •      •  Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.

SPECIFICATIONS


   Input Power

   

   RF Power

  •      •  RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels:
            Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W
  •      •  RF frequency:   13,56 MHz


   Control Panel

  •      •  Control Function: Clean time, RF Power, Vacuum Pump.

  •         


   Plasma Chamber

    

  •      •  6" diameter x 6.5" length quartz chamber
  •      •  3 Liter Capacity
  •      •  Hinged type door with viewing window for easy sample loading and observing


   Vacuum Pump

   


  •      •  One Double Stage Rotary Vane Vacuum Pump
     
    (156 L/m ) with Exhaust filter and vacuum pipe are
             included for the equipment
  •      •  Both 110V or 220V are available, please specify when purchase.


   Inert Gas

  •      •  Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air, and Mixed gas
            depended on what kind material will be treated. ( not included in the package)
  •      •  No flammable gas shall be used for the plasma cleaner


   Optional

    

  •      •  Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing
            up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options
            or Click the picture left for Two Channel Gas Mixer.
  •      •  If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load


   Dimensions

    •      •  400mm L ×300mm W ×300mm H
    •      •  16" x 12" x 12" (inch)

       Net Weight      30 Lbs

       Shipping Weight & Dimensions

    •      •  140 lbs
    •      •  40"x30"x23"

       Warranty      One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
       Application Note:      Positive Pressure may damage Plasma Quartz Chamber.
       Operation Manual