Plasma Enhanced CVD Tube F...

300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF

300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF

기본 정보
Product Name 300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF
Sale Price Call for Price
Product Code OTF-PECVD-RF
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Tube Size

 
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.

SPECIFICATIONS

Noise<50 dB
Output Power5 -300W adjustable with ± 1% stability
RF frequency13.56 MHz ±0.005% stability
Reflection Power200W max.
MatchingAutomatic matching
RF Output Port50 Ω, N-type, female
CoolingAir cooling
Power208-240VAC, 50/60Hz

Tube Size

50, 80 or 125 mm OD please select from option bar  ( larger diameter coil up to 11" diameter is available upon request )


Application

Combine with MTI's tube furnace to get PECVD system

   


Dimension




Optional

Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:

     Sealing flanges for 40 - 42 mm O.D tube     1


Demo Video




Warranty One year limited warranty with lifetime support