Three Zone 1500°C Split Tube furnace
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Plasma RF Power Supply
| • Output Power: 5 -300W adjustable with ± 1% stability.- • RF frequency: 13.56 MHz ±0.005% stability.
- • Reflection Power: 200W max.
- • Matching: Automatic
- • RF Output Port: 50 Ω, N-type, female
- • Noise: <50 dB.
- • Cooling: Air cooling.
- • Power: 208-240VAC, Single Phase, 50/60Hz
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Anti-corrosive Pressure Gauge
| • 3.8x10-5 to 1125 Torr measurement range- • Anti-corrosive, gas-type independent
- • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens process cycle
- • Easy to exchange plug & play sensor element
- • Click the picture to view detail spec.
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Oil-less Vacuum Pump Station and Valves
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Mass Flowmeters & Gas Mixing Station
| • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the- bottom case to control gas flow rate automatically. One gas mixing tank is installed on the
bottom case with liquid release valve.- º MFC 1: Gas flow range from 0~100 SCCM
- º MFC 2&3: Control range from 0~200 SCCM
- º MFC 4: Control range from 0~500 SCCM
- • Gas inlet fitting: four 1/4NPS.
- • Gas outlet fitting: four 1/4NPS.
- • Power: 185-220VAC 50/60Hz
- • 4 stainless steel needle valves are installed on the left side of the bottom case to manually
control the mixing of 4 gas types. - • Four channel gas flows are integrated into one PLC with touch screen panel to control
- • ( optional: constant pressure control module )
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| • Three precision digital temperature controllers to control three heating zone independently- • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- • Built-in overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • Three K-type thermocouples (one for each zone).
- • RS485 Communications Port.
- • Optional:
- The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost.
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
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Overall Dimensions | • Furnace: 865 L x 654 W x 707 H mm - • Sliding Rail: dual rail with 1750 mm length
- • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
- • Net weight: 220 Lbs.
- • Shipping weight: 1200lbs.
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Warranty
| One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional)
| • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.- • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
profile, manage heat-treatment recipe, record and plot data for MTI furnaces. - • A wireless remote control provides up to 300 meters operating range.
- • Above features are available upon request at an extra cost (up to $1,000). Please contact us for
more information. - • Note: The software is only compatible with MTI’s Yudian Temperature Controller
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Compliance
| • CE Certified- • NRTL or CSA certification is available upon request at extra cost.
( please click marks below to learn details )
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| • The tube furnaces with mullite tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bars / 3 PSI - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • Never heat the furnace while the gas release valve is closed and a positive pressure condition
exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages. - • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
- • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely
used up to 1300°
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Operation Insturctions
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Shipping Weight & Dimensions
| • Total 4 Pallets- • #1: 1200 lbs, 93"x40"x59"
- • #2: 220 lbs, 48"x40"x45"
- • #3: 285 lbs, 48"x40"x45"
- • #4: 200 lbs, 48"x40"x45"
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