Furnace Structure
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• Both furnaces are double layer steel structure with 1200°C max.
working temperature- • Each Furnace has 200mm heating zone and 60 mm long constant
temperature zone - • One pair of sliding rails are installed on bottom of furnace, which
allows furnace to be manually moved from side to side with max
sliding distance 400 mm.
- • Vacuum flanges is installed for immediate use.
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Power of furnace | 2.5 KW in total |
| Voltage | AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required |
Max. Temperature | 1200°C (<1 hour) |
Continuous Temperature | 1100°C |
Heating & Cooling Rates
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Heating Rate:
15°C/sec (RT - 150°C); 10°C/sec (150°C - 250°C); 7°C/sec (250°C - 350°C); 4°C/sec (350°C - 500°C); 3°C/sec (350°C - 550°C); 2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C); | Cooling Rate:
15°C/sec (1000 - 950°C); 10°C/sec (950°C - 900°C); 7°C/sec (900°C - 850°C); 4°C/sec (850°C - 750°C); 2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C); | Note:
The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not. |
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Heating Zone Length | 200mm( ~8") for each furnace |
Constant Temperature Zone | 60 mm (+/-1°C @ 400-1200°C) |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Processing Tube Size | High purity fused quartz tube Size: 50mm O.D x 44mm I.D x1400 mm Length |
Temperature Controller
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• Two furnaces are PID automatic control with 30 programmable
segments for precise control of heating rate, cooling rate and
dwell time.
- • Built-in over temperature alarm and protection allows for operation
without an attendant. - • Two K-type thermal couples are included.
- • Optional:
- º The furnace may be operated by PC by installing
control module. Please order an MTS-02 control module
at extra cost.
- º If you order the PC control module together with the
furnace, we will install and test it before shipping. We
recommend you to order a computer (laptop) from us to
avoid software installation problems. For more
information please click here.
 
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Temperature Accuracy | +/ - 1°C |
Vacuum Flanges
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• Stainless steel vacuum flanges with a vacuum gauge ( click
picture bottom left to see details) are installed on both ends of
the tube with heavy duty support. - • Optional flange with a KF25 vacuum port and digital vacuum
gauge is available at extra cost. ( click picture bottom right to see
details)
 
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Sliding Rails / Table
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• Double sliding rail made by Cr-plated steel- • Sliding length: 1200 mm
- • Two slide stopping clamps are included for holding the position
of the furnaces.
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Vacuum Level
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• Limited by pump ( pump is not included, click on pictures to order )- º 10E-5 torr can be achieved via molecular pump
- º 10E-2 torr can be achieved via a mechanical pump.
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Optional for upgrate
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• Motorized sliding is available upon request ( please click bottom
left picture )- • 1-9 chaanel gas mixing and delivery moudles is availle ( click the
picture 2nd picture in below to order ) - • 100W - 500W RF plasma generator for plasma enhanced
processing is available upon request ( click picture bottom right
to see detail ). This module allows you build your own Plasma
Enhanced Thermal CVD system
  
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Dimensions
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• Furnace: 340 x 300 x 400 mm- • Total:1600 x 430 x 500 mm ( furnaces + sliding )
- •
 
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Net Weight | ~ 80 Kg
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Shipping Package Size | 70" x 45" x 45" (inch)
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Shipping Weight | 300 lbs
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Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control(Optional)
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Compliance
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• CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification
at extra cost. （ please click marks below to learn details )
    
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Application Notes
Click here to learn the installation of a gas regulator
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• Tube furnaces with quartz tubes are designed for using under
vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- • Attention: A two-stage pressure regulator must be installed
on gas cylinder to limit the pressure to below 3 PSI for safe
operation. Click here to learn the installation of a gas regulator.
- • The flow rate for gasses should be limited to < 200 SCCM
(or 200 ml/min) for reducing thermal shocks to the tube - • Vacuum limit definition for all quartz tube furnaces: * Vacuum
pressures may only be safely used up to 1000°C
- • Click here to learn How to set up quartz/ ceramic tube and
vacuum flange for MTI Tube furnace.
- • After CVD, the graphene must be transferred from the metal
catalyst to another substrate for most applications. By using the
graphene transfer tape, the residue can be low.
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Warning
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• Fast sample cooling can be achieved by sliding the heating
chamber away. Please wear protective gears such as heat
resistant suit & gloves if you intend to do so. DO NOT TOUCH
THE TUBE SURFACE WHEN IT IS HOT!
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Operation Instructions
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