• The vacuum chamber is made of 304 stainless steel with reinforcing rib 
• Inside vacuum chamber size:  470mm L×445mm D×522mm H  (~ 105 Liters ， 18.5“x17.5"x 20.5")
• Round 380 mm Dia. hinged type door with 150 mm Dia glass window
• A vacuum-sealed 150mm diameter glass window is installed on the front door for easy observation
• Silicone O-ring can be used for all vacuum seals.
• Temperature range: -15 to 150°C

• 4E-3 torr by mechanical pump (click here to order mechanical pump)
• 4E-5 torr by turbo pump (click here to order turbo pump) Note: Vacuum pump is sold separately.
• 4E-5 torr by a high-quality turbopump which directly connect to chamber

• One KF40 port was built on the right side of the chamber to connect to the vacuum pump.
• Four KF25 ports were built in the chamber, 3 on the left and one on the right
• Three 1/4" BSPP fittings with needle valves are installed for the gas inlet & outlet ( 2 at the back and 1 on the left)
• One 1/8 NPT port is installed on top of the chamber to connect a vacuum gauge.
• The top plate is removable to make a customized port and fitting
• Customer fitting and port are available upon request

• Sputtering coating system:
• A complete sputtering coating system consists of five parts. Vacuum chamber, sputtering heads, sputtering power supply (DC or RF), pumping system (mechanical pump or turbo pump), and water cooling system.
  
• This vacuum chamber is able to install single or multiple sputtering heads (up to 5). Maximum up to three 2" heads or five 1" heads. Please contact us regarding the number of sputtering heads and sizes. We will pre-fabricate the vacuum chamber and install the sputtering heads. 

• The picture on the left shows a complete RF/DC (switchable) sputtering coating system by using this vacuum chamber. Single sputtering is equipped. w/ Mechanical + turbo pumping system.

Optional

• Please click the picture below left 1- 2  to choose a vacuum gauge at extra cost
• Please click the picture right to choose a vacuum pump station, in which the vacuum chamber can be put on its top

         


（click to see other components)

Dimension

Operation

Warranty