Rotary & RockingTube Furnace(1 - 3 zone)

4" Two Zone Rotary CVD Tube Furnace @1200C Max. - OTF-1200X-4-R-II-UL

4" Two Zone Rotary CVD Tube Furnace @1200C Max. - OTF-1200X-4-R-II-UL

기본 정보
Product Name 4" Two Zone Rotary CVD Tube Furnace @1200C Max. - OTF-1200X-4-R-II-UL
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Specification



Furnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be tilted up to 30o by electricity.
  • Split cover enables faster cooling and easy operation

Heating Zone length
  • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
  • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.






Processing tube & Sealing Flange
  • Fused quartz processing tube, please click the pics below for details:                 
  • One pair of 60mm SS sealing flange with needle valves and the rotatable gas connector is included
 Four Mixing Blades                    Dimension 
Optional:
  • High Purity Graphite Tube (2.36'' O.D x 2'' I.D x 48'' L), please click the pics below for details:
  • High-Temperature stainless steel alloy tube with Max. working temperature at 900°C is available upon request
  • Ni-Based super-alloy100 mm dia.  the tube is available at extra cost for Max. 1100oC @0.4 Mpa
  • Anti-corrosive double layer tube is available for HCL or CH4 gas upto 800oC and 3 Nax Max.
                       
Gas Fittings
 
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube
Max. Working Temperature1100°C for continuously 1200 °C Max for < 2 hours
Heating RateRecommend: 10 °C/min
Maximum: 15 °C/min
Temperature Controllers
Two PID digital temperature controller with 30 segment programmable,  +/- 1°C
Thermocouple
 


Two Omega
K type 3mm OD x 6" L with high-temperature tolerance (220°C) connector
Tube rotating Speed
 0 - 10 RPM variable
Furnace tilt angle
 Left: 0~30° ; Right: 0~15°
Chamber pressure
 4.5x10-2 torr (<0.1mtorr/s leaking rate if close all the valves to airtight the tube chamber)
Production yield
  2 kg per batch
Power
  4 KW Max
Voltage
  208 - 240V single phase (30 A Breaker required)
Warranty One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)  
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  •    



Compliance
  • CE Certified
  • NRTL (UL61010)  or CSA certification is available at extra cost.( please click marks below to learn details )
  • Patten Number :  ZL-2011-2-0162234.8 SINCE 2011-5-19
  •      



Operation Instructions

       
 Furnace dimension:
1300×600×1200mm 
 Product net weight
100Kg
 Shipping dimension49" x 40" x 70"
 Shipping weight450 lbs


Application Notes
  • The concept of continuous power feeding and processing can be realized by the use of Magnetic Fluid Sealed Swivel Coupling in line with Volumetric Feeder and Rotary Furnace. Please view the assembling approach diagram and video in below.  
  • For CVD coating, you may choose our multi-channel Gas delivery system as Pic below right.
  •             
  • For CVD coating, you may choose our multi-channel Gas delivery system and automatic feeding system  as Pic below
  •  
  • Ref Article: Scalable synthesis of silicon-nanolayer-embedded graphite for high-energy lithium-ion batteries
Warnings
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C