VHP-5T-4 is an electric vacuum lamination hot press designed for wafer bounding or thin film transformations up to 100 mm x 100 mm.
It has a max. working temperature of 500ºC along with a max. pressure of 6 Tons.
SPECIFICATIONS
Structure
•Two 150 mm x 150 mm flat heating plates made of high temperature Cr steell with max. working temperature of 500ºC •1000 W Heating tube is inserted into the center of the heating plates for fast heating •Max. 6 metric tons •Two precision temperature controllers which control two heating plates separately with 30 programmable segements •Water cooling plates are built on bottom heating plate for fast cooling
Hydraulic Pump
•Modified 20T electric hydraulic press is connected to vacuum chamber. •Movable distance between two heating plate : 15 mm •Automatic max. pressure controlled via a digital pressure gauge. •Pressure accuracy +/- 0.01 Mpa ( 0.1 kg/cm2 ) •Two flat heating plates are installed with water cooling plates for Max. 500ºC working temperature •Water cooling ( > 15 L/min ) is required to cool the heating plates when using the hoot press over 200ºC.
Please order recirculating water chiller as optional for safe application
Temperature control and Pressure Display
•Two precision temperature controllers with 30 segment programmable +/1°C accuracy control the heating plates separately. (please click picture below left to see detail)
○ The temperature controllers are with PID auto tune function, over-temperature protection and thermal couple broken protection ○ Max. Temperature : 500°C with inert gas or vacuum with accuracy +/-1°C ○ Max. Heating rate : < 2.5°C/min ○ Software and PC interface is built in the controller , which can be connected to a PC for computer controlling via a RS232 connector ( click picture below middle to see details ) ○ Digital pressure meter ( controller ) is built outside vacuum chamber.
You can set pressure at desired value which can stop the electroc hydraulic press automatically
Vacuum Charmber
•Electric hydraulic press and heating plates are placed inside the vacuum chamber •Vacuum chamber is made of 304 stainless steel with reinforcing rib •Inside vacuum chamber size : 372 mm (L) x 420 mm (W) x 480 mm (H) ( 75 Liters ) •Vacuum sealed 150 mm diameter glass window is installed on the front door for easy observation •Silicone O-ring can be used for all vacuum seals •One precision digital vacuum guage ( 10E-4 torr ) is installed on the vacuum chamber
Power Requirement
•Power consuming : 2500 W •Power input : 208 - 240 VAC, 50/60 Hz single phase
Water cooling
•One recirculating water chiller is included for cooling heating plate from over-heated and faster cooling. •Please click picture below to link to deail specs
Optional
•Optional equipments are available at extra cost
○ Vacuum level for mechnical pump can reach < 5 x 10E-2 torr , and can reach 10-4 torr with quality turbopump ○ The vacuum station shown in the very right picture is available upon request, which can be also used to place the temperature controller
Operation Instructions
Overall Dimensions
600 mm (L) x 500 mm (W) x 400 mm (H)
Warranty
•The pressing machine was quality inspected in USA and lifetime support is provided •One year limited standard warranty (Extended warranty is available upto 5 years at extra cost)
