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Slidable Dual Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum System - OTF-1200X-80-II-4CV-PE-SL

Slidable Dual Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum System - OTF-1200X-80-II-4CV-PE-SL

기본 정보
Product Name Slidable Dual Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum System - OTF-1200X-80-II-4CV-PE-SL
Sale Price Call for Price
Product Code OTF-1200X-80-II-4CV-PE-SL
Quantity 수량증가수량감소
상품 옵션
 
  •  Personalization
Choose the tube size* Item Number
2" (50mm) OD x 1.7" ID x 71" Length OTF-1200X-80-II-4CV-PE-SL
3.14" (80mm) OD x 2.83" ID x 71'' Length
4" (101mm) OD x 3.63" (92mm) ID x 71'' Length
* denotes required field
  • OTF-1200X-80-II-4CV-PE-SL is a dual zone slidable PE-CVD tube furnace system consists of 500W RF plasma source, 80D x 1600 L mm split tube furnace with an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high quality oil-less vacuum pump.    Such a PE-CVD furnace is a new tool to grow nano-wire or graphene with the following benefits :

  • ○  Lower temperature processing compared to conventional CVD
    ○  High heating & cooling rate using sliding furnace
    ○  Dual heating zone to create thermal gradient up to 200ºC
    ○  1100ºC Max. working temperature
    ○  Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and
    ○  single layer graphene

  •  SPECIFICATIONS
  • Dual Zone Split Tube
    furnace with Sliding Rail

    (Click thumbnails to see
    detailed specs)
  • •Max 1100 ºC for continuous heating
    •Two programmable precision digital temperature controllers with 30 segments.
     
    •Two separately controlled Heating Zones :
     High purity quartz tube :

    ○  200 mm length for each heating zone
    ○  400 mm total in heating length
    ○  250 mm constant central temperature heating area if both zones were heated at the same temperature
    ○  500 ºC max temperature discrepancy between two zone with thermoblocks in between

     
    •3.14" (80 mm) OD x 2.83" ID x 71'' Length - Standard
     or 2" (50 mm) OD x 1.7" ID x 71" Length - Optional
     or 4" (101 mm) OD x 2.83" ID x 71'' Length - Optional
     
    •Input power : 208 – 240 V AC input,   single phase at max. 4 KW
  • Plasma RF Power Supply
  • •Output Power : 5 - 500 W adjustable with ± 1% stability.
    •RF frequency : 13.56 MHz ±0.005% stability.
    •Reflection Power : 200 W max.
    •Matching : Automatic
    •RF Output Port : 50 Ω,   N-type,   female
    •Noise : < 50 dB.
    •Cooling : Air cooling.
    •Power : 208 - 240 VAC,   Single Phase,   50/60 Hz /li>
  • Anti-corrosive Pressure Gauge
  • •3.8 x 10-5 to 1125 Torr measurement range
    •Anti-corrosive, gas-type independent
    •High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
    •Fast atmospheric detection eliminates waiting time and shortens process cycle
    •Easy to exchange plug & play sensor element
    •Click pic to view detal spec.
  • Mass Flow meters &
    Gas Mixing Station
  • •It is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.    LCD touch screen is integrated to provide easy control on the gas flow rate of each independent channel.

    ○  Working Temperature : 5 ~ 45 ºC
    ○  Max. Pressure : 3 x 106 Pa
    ○  Accuracy : ± 1.5% FS
    ○  Liner : ±（0.5 - 1.5）%F.S.
    ○  Duplicate accuracy : ± 0.2% F.S.

    ○  Controlling Range :

    ○  Controller 1 : 0 ~ 100 SCCM
    ○  Controller 2 : 1 ~ 199 SCCM
    ○  Controller 3 : 1 ~ 199 SCCM
    ○  Controller 4 : 1 ~ 499 SCCM

  • Heating & Cooling Rates
  • •RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here  )
    •In order to achieve Max.heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
    •In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
    Heating Rate Cooling Rate
    15°C/sec (RT - 150°C); 15°C/sec (1000 - 950°C);
    10°C/sec (150°C - 250°C); 10°C/sec (950°C - 900°C);
    7°C/sec (250°C - 350°C); 7°C/sec (900°C - 850°C);
    4°C/sec (350°C - 500°C); 4°C/sec (850°C - 750°C);
    3°C/sec (350°C - 550°C); 2°C/sec (750°C - 600°C);
    2°C/sec (550°C - 650°C); 1.5°C/sec (600°C - 500°C);
    1°C/sec (650°C - 800°C); 1°C/sec (500°C - 400°C);
    0.5°C/sec (800°C - 1000°C); 0.5°C/sec (400°C - 300°C);
  • Overall Dimensions
  • •Furnace : 550 x 380 x 520 mm
    •Sliding Rail : dual rail with 1750 mm length
    •Two Adjoined Bottom Mobile Cases : 1200 x 1200 x 1200 mm.
    •Net weight : 220 Lbs.
    •Shipping weight : 1200 lbs.
  • Warranty
  • One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
  • Compliance
  • •CE Certified
    •UL / MET / CSA Certification is available upon request,
     additional charges will apply
    •Temperature controller is MET and CE Certified
     
  • Application Notes
  • •Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
    •Click here to learn  How to set up quartz / ceramic tube and vacuum flange for MTI Tube furnace.
    •MTI reserves the right to modify its PE-CVD design at any time without notice, but promises quality in future designs meet and exceed the specifications above.
  •  Related Products
 
  

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