• A double-layer steel casing with air cooling that ensures the furnace shell ≤60℃.
• Separated temperature control unit for remote operation
• 300 mm length heating zone with 100 mm constant temperature zone with +/- 3ºC
• One set of sliding rails is installed which allows the furnace to move from one side to the other side. Automatically at variable speeds using the control knob is optional at extra cost. 
• Vacuum flanges and the digital vacuum gauge are installed for immediate use.
• Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1100mmL) is included with airtight flanges
• Annealing wafer up to 4" diameter max. with quartz boat

Power

• AC 208-240V Single Phase, 50/60 Hz
• 3 KW

Working Temperature

• Maximum:1200℃< 0.5 hrs
• Continuous: 1100℃ or less

Sliding Control

• Dual sliding rails made of Cr plated steel
• Sliding rail length: 1200 m
• Sliding Range: 450mm
• Optional: Automatic sliding is driven by DC motor. is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.

Temperature Controller

• Two PID automatic controllers with 30 programmable segments for control of heating  & cooling rate, and dwell time.
• Built-in overheating & thermocouple broken protection.
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
• PC Control:  
  • An MTS-02 control module is included for PC control on this furnace.
  • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.  

Heating and Cooling Rate

• Recommend Heating Rate for heating elements protection: ≤ 20°C/min
• Rapid heating is achieved by sliding a preheated sample area
  • Max. heating rate is about 2ºC/S
• Rapid cooling is achieved by sliding the heated furnace away from the sample area at room temperature. 
  • Max. cooing rate is about 4ºC/S

Vacuum Flanges

• Stainless steel vacuum flanges are installed on both ends of the tube.
• Left flange:
  • One Φ6.35 inlet with a pressure gauge
  • One stop valve. 
  • One port for armored thermocouple
• Right flange:
  • One KF25 port
  • One gas outlet with a stop valve.
  • One port for armored thermocouple

Vacuum Level 

•  Limited by a vacuum pump
  • 10^-2 torr can be achieved by a mechanical pump
  • 10^-5 torr can be reached by a molecular pump
•      The vacuum pump is not included, please order separately 

Dimensions

• 1300x 550 x 600 mm (furnace close)
• 1300x 750 x 850 mm (furnace open)
• 350x 250 x 410 mm (control box)

Net Weight

~ 110 Kg

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

• CE Certified
• NRTL certification(UL61010) or CSA certification is available at extra cost.
  

Application Notes

• Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa 
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
•  Vacuum pressures may only be safely used up to 1000°C

Demo Video