Furnace structure
| - The Vacuum chamber ( 20" ID) is made of Stainless steel to reach 10-5 torr via turbopump
- Two 12" IR heating plates are located on the top of the bottom inside the chamber
- The top sample holder is rotatable at a speed of 1 - 10 RPM for uniform film deposition
- Max. working temperature is 950ºC and The heating rate can reach 1200oC/minute max.
- Eurotherm precision temperature controller with +/- 0.1oC accuracy
- Touch Screen Computer control for all processing parameters
|
| Power | - 208 - 240VAC, three phases, 50/60 Hz ( 380V AC 3 phase is available )
- 60 KW max. ( 200A breaker needed )
- A power cable is included, but no plug
|
Vacuum Chamber | - Chamber dimension: ID 500mm x H 460mm
- Two 60mm dia quartz windows are built for easy observation.
- One air-tight sliding baffle is built-in for blocking the evaporation source under high vacuum/
- A precision anti-corrosion digital vacuum gauge is in the standard package (Pic. 1)
- Vacuum level: 10-5 torr by turbopump ( Pic. 2) or 10-2 torr by a mechanical pump (pic. 3) Please click Pic.2 2 or 3 to choose the vacuum pump at extra cost
 Pic.1  Pic. 2  Pic. 3
|
Heater and Sample Holder
| - Two IR heaters are located on top and bottom of the chamber with adjustable gaps from 2 - 25 mm. (Pic. 1
- Heaters are made of stainless steel with a water cold jacket to keep heat insulation.
- 12 " Dia. the circular wafer holder is built into the top heater for holding the substrate.
- The graphite plates are placed on the top of the IR heater to make heating more uniform (Pic. 2)
- The top sample holder is rotatable at an adjustable speed from 1 - 10 RPM
- A 58L/min circulating water chiller is included for cooling heaters (Pic.3)
 Pic. 1  Pic. 2 Pic. 3
|
Control System
| - Two Eurotherm 3000 digital temperature controllers with 24 segments programmable offer independent controlling of top and bottom heaters with +/- 0.1ºC accuracy
- All operations, such as temperature profiles, vacuum pressure, rotation speed, rotation speed and lifting of the flange are controlled by a touch screen computer via a PLC.
- The computer can show the temperature and vacuum profiles and star 10 pre-set programs of processing
|
Working Temperature
| - Max. temperature for each heater: ≤ 950ºC.
- Max. the temperature difference between the two heaters: ≤ 300ºC
- Max. Heating: < 8ºC/s ( heating single heater only )
- Max. Cooling: < 20 ºC/s (600 - 100ºC) Max.
|
| Heating & Cooling Rate | - Heating: < 8ºC/s ( heating single heater only )
- Cooling: < 10ºC/s (600 - 100ºC) Max.
|
Dimensions
( click pic to see dimension ) |  L 1450 X W 1250 X H2100 mm Weight: ~500 Kg |
Optional
| - If using corrosive gas, please use a cold trap or anti-corrosive dry pump as in pictures 1-2 at extra cost.
- You may choose a digital MFC gas delivery system by clicking Pic. 3 below.
 Pic. 1  Pic. 2  Pic.3 |
| Warranty | One year limited with lifetime support ( Consumable parts such as quartz tubes and heating lamps are not covered by the warranty). |
| Compliance | - CE Certified
- UL / MET / CSA Certification is available upon request, additional charges will apply.
|
| Operation Instructions | 
|
References
(Please click right to see related articles) | |
