Furnace Structure
| - IR heating holder with water cooling is installed in a vacuum chamber ( 16x14x15")
- The heating chamber of 8.5"x8.5" ( 200x200 mm) dia x 10 mm height
- 25 mm dia quartz observation window is built-in on the front door
- KF 25 vacuum port and the valves of the gas inlet and outlet are built into the vacuum chamber
- A mechanical vacuum gauge is included
- A digital temperature controller with 30 segments programmable is included
- A k-type thermal couple is included
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Power
| - AC 208V-240V, single phase, 50/60 Hz
- 12 KW ( 60A breaker is required)
- Note: A power cable is included without a plug. Please install a plug by yourself or the left picture to choose a plug according to your lab requirement
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Working Temperature
| - 30 segments programmable via a digital temperature controller
- Working Temperature: <= 800 °C continuously Max. 1000 °C, < 30 minutes
- Max. Heating rate: <= 300°C/ min ( 5°/second)
- Max. Cooling: <= 60ºC/min ( 1°/second)
- Temperature stability: +/- 1°C
- RS485 port and soft is included for PC operation
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Heating Chamber & Water Chiller
| - Two IR heating plates are built-in stainless steel holders with water cooling jacket
- 8.5" square x 10 mm height heating chamber with water cooling jacket, which can accept 8"x8" wafer
- One quartz plate is placed in the bottom heating chamber to accept a wafer up to 8" x 5 mm thickness
- One 16L/minute recirculating water chiller is included for cooling the heating chamber
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Vacuum level and Vacuum Pump & Gas delivery system ( optional)
| - 10- 2 torr via a rotary mechanical pump ( cold condition ) Pic. 1
- 10-4 torr via turbopump (a cold condition with baking ) Puc. 2
- KF25 vacuum port and gas valves are included
- One mechanical vacuum gauge is included
- The vacuum pump is not included. Please click the link below (Pic. 1&2) to order separately
- Digital vacuum gauge up to 10-5 torr with KF16 port is optional ( Click Pic 3 to order )
- You may order an inner gas delivery system by clicking Pic, 4
- Pic. 1 Pic. 2Pic. 3 Pic. 4
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Overall Dimensions
| Click the picture to see the details |
Net Weight | 45 kg |
Shipping Weight | 150 lbs |
Shipping Volume | 45"(L) x28"(W) x35"(H) |
Warranty
| - One-year limited warranty with lifetime support
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
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Compliance
| - CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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Operation Demo Video |
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