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1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV series

1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV series

기본 정보
Product Name 1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV series
Sale Price Call for Price
Product Code GSL-1700X-F3LV
Quantity 수량증가수량감소
상품 옵션
 
  •  SPECIFICATIONS
  • GSL-1700X-F3LV series tube furnace is a CE certified alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5 x 10-2 torr and mix 1- 3 type of gases for CVD or diffusion.  This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
  •  Personalization
Select the tube size Item Number Configuration
60mm O.D alumina tube GSL-1700X-F3LV -60OD
80mm O.D alumina tube (+   ) -80OD
100mm O.D alumina tube (+   ) -100O.D
  •  Tube Furnace
  • Structure
  • •Double layer steel casing with air cooling.
     Two cooling fan inside to keep temperature of outside case < 55°C.
    •High purity fibrous alumina insulation for Max, energy saving.
  • Power Consumption
  • 5 kW Max.
  • Input Voltage
  • •AC 208 ~ 240 V,
    •Single Phase,
    •50/60 Hz
  • Max. Heating Temp.
  • 1700 °C
  • Max. Heating Rate
  • 5 °C/min
  • Max. Cooling Rate
  • 5 °C/min
  • Heating Zone Length
  • 455 mm (18")
  • Constant Temp. Zone
  • 150 (+/- 1 C)
  • Temperature Accuracy
  • +/- 1 °C
  • Temperature Controller
  • •PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    •30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    •Please click here to learn why SCR is more accurate than SSC
     (Solid state relay). 
    •Built in PID Auto-Tune function with overheating & broken thermocouple protection.
    •Over temperature protection and alarm allows for operation without attendant(s).
    •+/- 1 ºC temperature accuracy.
    •RS485 Communications Port.
    •Optional:

    •The furnace may be operated by PC by installing three control modules.   Please order the MTS-02 control modules  at extra cost.
    •If you order the PC control module together with the furnace, we will install  and test it before shipping.
     We recommend you to order a computer laptop from us to avoid software installation problems.
     For more information please click here.     

  • Heating Elements
  • 1800 grade MoSi2 ( 8 pcs )
  • Tube Materials and Size
  • •99.8% high purity Al2O3 ceramic tube
    •ID: 72 mm x OD: 80 mm x 1000 mm length.
  • Digital Vacuum Gauge 
  • •Corrosion-proof Capacitance Diaphragm Gauge  with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
    •Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10-5 ~ 1000 torr).
  • Vacuum Sealing
  • •Two stainless steel flanges with digital vacuum gauge and valves is
     included.
    •Vacuum pressure can reach 5x10-2 torr via mechanical pump.
    •The leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter:      •(For a whole 24 hours curve display, the time segment through 08:00:00 ~ 21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)
  •  Vacuum Pump and fittings
  • Fittings
  • •The standard vacuum fittings include:

    •A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" swagelok tube connector.
    •A 1000 mm long KF-25 stainless steel vacuum bellows
    •Four KF-25 quick clamps

  •  Gas Flow Meter
  • •Three gas flow-meters (4% accuracy FS) are installed inside mobile case provide monitor to
     gas flowing rates.

    1)  Compact direct read flow meter, 10 - 100 cc/min.
    2)  Compact direct read flow meter, 16 - 160 cc/min.
    3)  Compact direct read flow meter, 25 - 250 cc/min.

    •One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
    •Four stainless steel needle valve are installed in the front panel to control the gas route independently.

    Front Panel
    Back Panel
    Gas Routes
  •  Shipping Info
  • Product Dimensions
  • •80 & 100mm O.D Tube Furnace: 550 x 500 x 700 mm L x W x H
    •Gas Mix Station: 600 x 600 x 700 mm
    •Vacuum station: 600 x 600 x 700 mm
  • New weight
  • 450 lb (in total)
  • Shipping Dimensions
  • Two cases in one pallet: 45 x 45 x 35" /ea. case
  • Shipping Weight
  • 500 lb (in total)
  •  Warranty
  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  •  Compliance
  • •CE Certified
    •UL / MET / CSA Certification is available upon request, additional charges will apply
    •Temperature controller is MET and CE Certified
    •Transformer is UL Certified         
  •  Application Notes
  •  Operation Instructions
  •  Related Products
 
  

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개인정보보호책임자 : 이청규(mti@mtikorea.co.kr) Contact : mti@mtikorea.co.kr 사업자 계좌번호 : 신한은행 140-013-598791 (예금주: 엠티아이코리아코퍼레이션(주))

엠티아이코리아 영남지사 (영남지사) 전화: 053-381-1998       팩스: 053-381-2009
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