Induction Heater
| - Working Voltage: 220V AC, 50/ 60Hz, Three Phase
- Max.Input Power: 15 KW
- Working Current: 5~52 Amps (a 60A breaker is required)
- Input Power Cable: min. 4AWG cable (the cable is not provided with the machine)
- Output Frequency: 30 - 80 kHz
- Duty Cycle: 100%
- Induction Coil: 150mm(OD) x 140mm(ID) x 65mm(H)
- Air Cooling: rear fan
- Protection: automatic water pressure, over-temperature, and overpower protection
- Refractory assembling: complete refractory assembling made of alumina, including bottom crucible support, crucible holder, and cover
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Temp. Controller & Thermocouple
| - Precision digital temperature controller with automatic PID tuning.
- 30 segments programmable for controlling heating and cooling rate as well as dwell time.
- Overheating & thermocouple failure protection.
- +/- 3 ºC temperature accuracy.
- Thermocouple: C type ( 1/4"x10" L ) ( please click here to order a spare as consumable)
- Continuous Working Temp. Range: 1000ºC~1900ºC
- Max Working Temperature: 2200ºC (for less than 30 minutes ) and 2000oC for 2 hrs)
- Max. Heating Rate:
- 10ºC/second (1000ºC-1200ºC)
- 8ºC/second (1200ºC~1500ºC)
- 3ºC~6ºC/second (1500ºC~1700ºC)
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Graphite Crucible & Refractory liners
| - High Purity Graphite Crucible: 2" OD x 1.57"ID x 4" Depth (4.3'' Height) is included. Max. Loading Capacity: Half of the total volume of the graphite crucible.
- Note: Graphite crucible is consumable, please click picture below-right to order spare
- Optional: Special designed graphite "Box" for accommodating single piece wafer substrate up to 1.5'' O.D x 1/8'' Thick is available upon request. It is an ideal wafer holder which can be inductively heated up and provide uniform heat treatment to the wafer inside.
- The crucible for melt infiltration is available upon request
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   - Three-layer special design refractory liner can withstand temperatures up to 2200C.
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Sealing Flanges & Quartz Chamber | - 130mm(OD) x 122mm(ID) x 360mm(L) Quartz tube is included, click pic.1 to order spare .
- Top Flange: Hinged type flange w/ 1/4'' T/C feedthrough, needle valve, and barbed fitting. (Pic.2)
- Bottom Flange: Stainless steel flange with a needle valve and KF-25 vacuum port. (Pic.3)
- KF25 angle valve & clamps and 1m SS bellows are included for connecting to the vacuum pump.(Pic.4)
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Pressure Sensor
| - Anti-corrosive capacitance diaphragm gauge, measurement range up to 3.8x10E-5 torr
- One 24V, 1A DC power adapter is included and ready to use.
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Flow Meter
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Pressure Relief Valve
| - This valve is designed to release pressure at 0.02 MPa for safety concerns
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Water Chiller (Optional)
| - Temperature range: 5 - 30°C
- Water Flow Rate: 58 L/min
- Water Tank: 15 Liters made of stainless steel
- Note: It is recommended to use a specific coolant to get the best performance. It is normal to wait a couple of minutes for cooling down after several trials of heating
- Note: the input voltage for the water chiller is 220V
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Vacuum Pump
| - One 156 L/min Double-Stage Rotary Vane Vacuum Pump
- Rate: 156 L/min up to 1E-2 torr vacuum
- Max. Power Consumption: 400W
- For US customers, a 110V Vacuum pump will be included
- If you choose a high-speed turbo-pump, the vacuum level can reach 10e-5 torr
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Heavy Duty Mobile Cart
| - Structure: Steel Frame Mobile Cart
- 600mm(L) x 800mm(W) surface for placing Induction Heater & Quartz Tube with Flange
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Protective Shield
| - For Non-UL Certified version, a protective shield made of phenolic sheets will be provided.
- For UL Certified version, a clear protective shield made of polycarbonate will be provided.
- The protective shield is to be placed around the quartz tube to contain the shooting glass shards if accidents were to happen.
 
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Product Dimensions
| - Induction Heater: 27.5"(L) x 51.2"(W) x 51.2"(H) (700mm x 1300mm x 1300mm)
- Water Chiller: 18"(L) x 18.7"(W) x 30"(H) (460mm x 475mm x 762mm)
- Please refer to the picture to the left for overall size info
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| Warranty | - One year limited warranty with lifetime support
- Consumable parts such as processing tube, thermocouple, refractory liners, o-rings, and heating coil are not covered by the warranty
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| Compliance | - NRTL certification is available upon request at extra cost, please contact us for a price quote. Certify standards include: 1)
- Induction heater: UL61010-1 & UL499
- Vacuum Pump: UL1450
- Water Chiller: UL61010 & UL1995
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Operation Video
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Warning
  Click here to learn more about the installation of a gas regulator. | - Attention: Protective inert gas must be continuously filled throughout during heating in order to protect the graphite crucible and C thermocouple.
- The C-type thermocouple is consumable which is not covered under our limited warranty.
- The Induction Melting System is designed to operate in low-pressure conditions (< 0.02 Mpa）
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSIG for safe operation. Click here to learn the installation of a gas regulator.
- Never heat the furnace while the gas release valve is closed. The pressure gauge must be used during the healing process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSIG to prevent unforeseeable damages.
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Application Notes
  | - Please click here to learn how to set up a crucible for melting.
- Melting time and temperature are related to materials, the crucible, refractory insulation, etc.
- PVT (Physical Vapor Transportation) system for growth bulk SiC crystal by changing a suitable crucible, see pic to the left.
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Net Weight
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| Shipping Weight & Dimension | - #1: 410 lbs, 48"x40"x65"
- #2: 355 lbs, 48"x40"x48"
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