Power | - 208 - 240VAC, single phase, 50/60 Hz
- 9.5 kW total (required for all heating parts and plasma to work properly)
|
Control Panel
| - All processing parameters of ALD are controlled by PLC via a 6" touch screen panel, including vapor pulse time, inert gas flow rate, temperature for heating bubbler and belt, and rotation speed of sample stage
- 13.56MHZ, 100W max. RF plasma power and auto-matching
- High-frequency ALD valves were used to control pulse duration interval with micro-second precision
- Control two channels of gas delivery with ±0.2%F.S via MFC
- Adjust vacuum pressure by controlling the gas flow rate
- Other parameters upon request of the customer
- Please click the picture left to see the control interface
|
ALD valve
| - One frequency ALD valve
- Max. frequency on/off: 283 HZ
- Min. Pulse time: 10 ms
- Can deliver drying gas or liquid-vapor
|
Shower Head
 
| - Material: Aluminium or Stainless steel
- 4" shower head with 0.5 mm holes
- 1/4" dia. tube for gas or vapor inlet which connects to ALD valve
- Special design for uniform distribution of gas or vaper
|
Sample Stage
| - 4" diameter rotary and heatable sample stage
- Speed: 0 - 5 RPM adjustable via the control panel
- Temperature: Although the operating temperature can be up to as high as 800 ℃, please limit the working temperature < 550 ℃ (+/- 5 ℃ accuracy) due to precursor deposition issue.
- Substrate size to be coated: 100 mm in diameter.
|
Chamber
 | - Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
- Please click here to order the Quartz Chamber replacement.
- SS 304 flanges to ensure the vacuum level: 10-5 torr by turbopump and 10-2 by the mechanical pump
- KF 25 vacuum port is built-in
|
| Heatable Bubbler | - Two 150 ml Heatable bubblers with temperature controllers are included for carrying precursors
 
|
| Dimension | - L 700 mm×W 700 mm × H 1400 mm
|
Vacuum Pump
( optional) | - A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below
 
|
Warranty
| One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements for related products below). |
Compliance | - CE certified and NRTLor CSA certification is available upon request at an extra cost.
|
Demo Video
| |
