OTF-1200X-4-RTP is a CE certified compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter.OTF-1200X-4-RTP is heated by 10KW halogen light with max. 120ºC/second heating rate. 50 segment precision temperature controller is built in with +/-1ºC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
Specifications:
Furnace structure
Double layer steel case with mullite liner without water cooling or air cooling
Heating element
8 pcs Halogen light tube (D=10 L=300 T =200, mm)
Heating zone
12" length with 4" constant temperature zone within +/-5ºC uniformity
Quart Tube & Sample Holder
Quart Tube Size: 4.33" O.D x 4.05" I.D x 15" Length
3" diameter Sample holder is inserted to sliding flange, which is made of Aluminum Nitride (AIN).
+\- 5°C temperature uniformity
One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia
AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
The sample holder is removable from flange and use the RTP for other purpose
Vacuum Flange
Made of stainless steel with double hi-temp. silicone O-rings, KF25 Vacuum Port and Needle Valves.
Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.
Flow-meter
One flow meter is installed on the front panel to adjust gas flow from 16 - 160 ml/min
Vacuum gauge
Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.
Vacuum pressure & Gas Fitting
Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.
Pressure can reach 10-4 torr by molecular pump with KF25 adapter.
Temperature control
PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.
Thermal Couple
S type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
Programmable Temperature controller
Built in protection from overheated and broken thermal couple
30 programmable segments
Auto tune function
Temperature control accuracy: +/- 1ºC
Built in RS485 port for PC control
Software is included. (Computer is not included)
One 15" screen laptop with operation software installed is available as option at $900 extra cost.
