Tube Furnace
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Structure
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• Double layer steel casing with air cooling. Two cooling fans inside to keep the
temperature of the outside case < 55°C.- • High purity fibrous alumina insulation for Maximum energy saving.
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| Power Consumption | 5kW Max.
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| Input Voltage | AC 208~240V, Single Phase, 50/60Hz |
Max. Heating Temp.
| 1700°C
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Max. Heating Rate
| 5°C/min
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Max. Cooling Rate
| 5°C/min
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Heating Zone Length
| 455mm (18")
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Constant Temp. Zone
| 150(+/-1C)
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Temperature Accuracy
| +/-1°C
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Temperature Controller |
• PID automatic control via SCR (Silicon Controlled Rectifier) power control with
phase angle fired, current limiting resistor.- • 30 programmable segments for precise control of heating rate, cooling rate and
dwell time. - • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers)
+ 15" laptop package is available at the options bar.
Click for the detail information about the MTS02-Y software kit. - º You may upgrade the temperature controller to the Eurotherm 3504
Temperature Controller which is fully compatible with LabVIEW.
This package includes a Eurotherm 3504 programmer, a communication
cable (RS485 - USB) and a software CD. Click the pic below to view the
full spec of Eurotherm 3504 temperature controller.
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| Heating Elements | 1800 grade MoSi2 ( 8 pcs ) |
Tube Materials and Size
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• 99.8% high purity Al2O3 ceramic tube- • ID: 73mm x OD: 80 mm x 1000 mm length.
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Digital Vacuum Gauge
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Vacuum Sealing
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• Two stainless steel flanges with a digital vacuum gauge and valves are included.- • Vacuum pressure can reach 5x10-2 torr via the mechanical pump.
- • The leaking rate is 6 mtorr/min in max. and 2 mtorr/min when stable, click the
picture. below to get details chart and data measured by CE certificated digital
vacuum meter:
(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X-axis is passed over in the chart, therefore, steep variety in there)
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Vacuum Pump and fittings
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Vacuum Pump
| Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
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Fittings
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The standard vacuum fittings include:
- • A pair of stainless steel vacuum flange with KF-25 pump connector, two needle
valves and one 1/4" Swagelok tube connector. - • A 1000mm long KF-25 stainless steel vacuum bellows
- • Four KF-25 quick clamps
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Gas Flow Meter
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• Three gas flowmeters ( 4% accuracy FS) are installed inside mobile case provide a monitor to gas
flowing rates.- º 1) Compact direct read flow meter, 10-100 cc/min.
- º 2) Compact direct read flow meter, 16-160 cc/min.
- º 3) Compact direct read flow meter, 25-250 cc/min.
- • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
- • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
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| Front Panel
| Back Panel
| Gas Routes
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Oxygen Monitoring |
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Shipping Info
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Product Dimensions
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• 80 mm O.D Tube Furnace: 550 x 500 x 700mm L x W x H - • Gas Mix Station: 600 x 600 x 700mm
- • Vacuum station: 600 x 600 x 700mm
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New weight
| 450 lb (in total)
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Shipping weight and Dimensions
| Three pallets: 220 lbs with 48x40x42", 200 lbs eith 39x31x40: and 180lbs with 39x31x40" dimension.
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Warranty
| One year limited warranty (Consumable parts such as processing tubes, O-rings, and heating elements
are not covered by the warranty, please order the replacement at related products below.)
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Laptop, software & WiFi Control (Optional) | |
Compliance
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• CE Certified- • UL / MET / CSA Certification is available upon request, additional charges will apply
- • Temperature controller is MET and CE Certified
- • Transformer is UL Certified
   
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Application Notes
Click here to learn more about the installation of a gas regulator. | |
| Operation Instructions |   |
