Induction Heater
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• Working Voltage: 220V AC, 50/ 60Hz, Three Phase- • Max.Input Power: 15 KW
- • Working Current: 5~52 Amps (a 60A breaker is required)
- • Input Power Cable: min. 4AWG cable (the cable is not provided with the machine)
- • Output Frequency: 30 - 80 kHz
- • Duty Cycle: 100%
- • Induction Coil: 150mm(OD) x 140mm(ID) x 65mm(H)
- • Air Cooling: rear fan
- • Protection: automatic water pressure, over temperature, and over power protection
- • Refractory assembling: complete refractory assembling made of alumina, including bottom
crucible support, crucible holder, and cover.
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Temp. Controller & Thermocouple
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• Precision digital temperature controller with automatic PID tuning.- • 30 segments programmable for controlling heating and cooling rate as well as dwell time.
- • Overheating & thermocouple failure protection.
- • +/- 3 ºC temperature accuracy.
- • Thermocouple: C type ( 1/4"x10" L ) ( please click here to order a spare as consumable )
- • Continuous Working Temp. Range: 1000ºC~1900ºC
- • Max Working Temperature: 2000ºC (for less than an hour)
- • Max. Heating Rate:
- º 10ºC/second (1000ºC-1200ºC)
- º 8ºC/second (1200ºC~1500ºC)
- º 3ºC~6ºC/second (1500ºC~1700ºC)
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Graphite Crucible & Refractory liners
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• High Purity Graphite Crucible: 2" OD x 1.57"ID x 4" Depth (4.3'' Height) is included for induction
heating and metal smelting. Max. Loading Capacity: Half of the total volume of the graphite
crucible.- Note: Graphite crucible is consumable, please click picture below-right to order spare
- • Optional: Special designed graphite "Box" for accommodating single piece wafer substrate up
to 1.5'' O.D x 1/8'' Thick is available upon request. It is an ideal wafer holder which can be
inductively heated up and provide uniform heat treatment to the wafer inside.
 
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Sealing Flanges & Quartz Chamber | - • 130mm(OD) x 122mm(ID) x 360mm(L) Quartz furnace tube is included, click pic.1 to order spare
or replacement - • Top Flange: Stainless steel hinged type flange with 1/4'' thermocouple feedthrough, needle
valve, and barbed fitting. (Pic.2) - • Bottom Flange: Stainless steel flange with a needle valve and KF-25 vacuum port. (Pic.3)
- • KF25 right angle valve & clamps and 1000mm long SS bellows are included for connecting
to the vacuum pump. (Pic.4)
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    - Pic.1 Pic.2 Pic.3 Pic.4
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Pressure Sensor
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• Anti-corrosive capacitance diaphragm gauge (Gas Independent), measurement range up to
3.8x10E-5 torr- • One 24V,1A DC power adapter is included and ready to use. Input voltage for the adapter is
110~240V Single Phase.
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Flow Meter
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Pressure Relief Valve
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• This valve is designed to release pressure at 0.02MPa for safety concerns.
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Water Chiller
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• Temperature range: 5 - 30°C- • Water Flow Rate: > 16 L/m,
- • Water pressure: 40PSI
- • Note: It is recommended to use a specific coolant to get the best performance.
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Vacuum Pump
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• One 156 L/min Double Stage Rotary Vane Vacuum Pump- • Rate: 156 L/min up to 10e-6 torr vacuum.
- • Max. Power Consumption: 400W
- • For US customer, 110V Vacuum pump will be included
- • If you choose high-speed turbo-pump, vacuum level can reach 10- 6 torr
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  ( Hi-Speed turbopump)
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Heavy Duty Mobile Cart
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• Structure: Steel Frame Mobile Cart- • 600mm(L) x 800mm(W) surface for placing Induction Heater & Quartz Tube with Flange
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Protective Shield
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• For Non-UL Certified version, a protective shield made of phenolic sheets will be provided.- • For UL Certified version, a clear protective shield made of polycarbonate will be provided.
- • The protective shield is to be placed around the quartz tube to contain the shooting glass
shards if accidents were to happen.
 
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Product Dimensions
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• Induction Heater: 27.5"(L) x 51.2"(W) x 51.2"(H) (700mm x 1300mm x 1300mm)- • Water Chiller: 18"(L) x 18.7"(W) x 30"(H) (460mm x 475mm x 762mm)
- • Please refer to the picture to the left for overall size info.
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Warranty |
• One year limited warranty with lifetime support- • Consumable parts such as processing tube, thermocouple, refractory liners, o-rings, and
heating coil are not covered by the warranty
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Compliance |
• NRTL certification is available upon request at extra cost, please contact us for a price quote.
Certify standards include: 1) Induction heater: UL61010-1 & UL499; 2) Vacuum Pump: UL1450;
3) Water Chiller: UL61010 & UL1995
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Operation Manual & Video |
  
Horizontal set up option
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Warning
Click here to learn more about the installation of a gas regulator.
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• Attention: Protective inert gas must be continuously filled throughout the experiment
in order to protect the graphite crucible and C thermocouple. The gas flow rate should
be limited to < 200 SCCM ( or 200ml/min)- • The C type thermocouple is consumable which is not covered under our limited
manufacturer warranty. - • The Induction Melting System are designed to operate in vacuum and low-pressure condition
(< 0.02 Mpa / 0.2 Bar/ 3 PSI) - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation.
Click here to learn the installation of a gas regulator. - • Never heat the furnace while the gas release valve is closed and a positive pressure condition
exists within the furnace chamber. The pressure gauge must be used to closely monitor the
chamber condition at all times during the heating process; please open the gas release valve
immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable
damages.
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Application Notes
 
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• Please click here to learn how to setup crucible for melting.- • Melting time and temperature are related to materials, crucible, refractory insulation, etc.
If you do not know whether the induction heater can melt your sample or not, please contact
our engineer for consulting. - • PVT (Physical Vapor Transportation) system for growth bulk SiC crystal by changing a suitable
crucible, see pic to the left below. - • This furnace can be modified as RTP (rapid thermal processing) and HPCVD system with
the gas delivery system. Please let us know about your special request/ requirement. - • Customize Induction Heater System is available upon request, please fill out "Customize
Induction Heating System Form" and email back to us. - • The compact CZ grower can be customized by the system with pulling & rotating mechanism
- • "continuous production of graphene", please click underline to view the paper
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Net Weight
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Shipping Weight & Dimension |
• #1: 410 lbs, 48"x40"x65"- • #2: 355 lbs, 48"x40"x48"
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