Furnace structure

• 
       •  Double layer steel case with two cooling fans to ensures low surface temperature.

•      •  Energy saving high purity fibrous alumina insulation.

•      •  One flange is supported by sliding rail to make sample loading /unloading easy; another seal flange
           is installed with a digital vacuum gauge.
  
  

Power Consumption

7 KW Max (power cord is included without plug)

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz (Please select the right pump in the option bar based on your working requirement) (40A breaker required)

Maximum Temperature

 1200 ^oC

Continuous Temperature

 1100 ^oC

Max. Heating Rate

 ≤ 20 ^oC /min

Heating Zone Length

• 
       •  Three zones: (900mm, 36" in total)
•          º  Zone 1: 229mm  (9")
•          º  Zone 2: 457mm  (18.0")
•          º  Zone 3: 229 mm (9")
  
  

Constant Temperature Zone

• 
       •  If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long
          with a temperature discrepancy of +/- 1^oC.
•      •  If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a
          temperature discrepancy of +/- 1^oC.
  
  

Temperature Accuracy

 +/- 1^oC

Heating Elements

 Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

• 
       •  Three precision temperature controllers to control three zones separately.
•      •  PID automatic control with 30 programmable segments for precise control of heating rate, cooling
          rate and dwell time.
•      •  Built-in overheating & broken thermocouple protection.
•      •  Over temperature protection and alarm allows for operation without attendant(s).
•      •  +/- 1 ºC temperature accuracy.
•      •  RS485 Communications Port.
  
  
•      •  Optional:  
  
  
•          º  The furnace may be operated by PC by installing three control modules.
              Please order the MTS-02 control modules at extra cost.
•          º  If you order the PC control module together with the furnace, we will install and test it
              before shipping. We recommend you to order a computer laptop from us to avoid software
              installation problems. For more information please click here.
  
  

European Temperature Controllers (optional upgrade)

• 
       •  1 heating channel
•      •  1 programs of 8 or 24 segment
•      •  Alarm Relay: Form 'A' and Form ‘C’ built-in
•      •  Digital Communications: RS485
•      •  Temperature Accuracy:  ±  0.1ºC
•      •  Recipes: Using a PC tool recipes can be created that can be used to change the operating
          parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where
          multiple products are processed using the same controller but require different parameters to be set.
  
  

Vacuum Sensor & Display

• 
       •  Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed
           for vacuum measurements with presence of corrosive gasses.
•      •  Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
          range (10^^-5 ~ 1000 torr).
  
  

Oxygen Monitoring (not included)

Vacuum Pump

Tube Size and Flange

• 
       •  130 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included.
•      •  Vacuum flanges with both valves and pressure gauge are included. 
  
  
•          Click to order spare            click here to choose a crucible
  
  

Sliding Rail

•      •  2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal
          (see bottom left picture)
•      •  5" Quartz tube can accommodate 4" quartz wafer boat without  holder (see bottom right picture)
  
  

Mobile Cart & Flow Meters

• 
       •  Three Channel Gas Optional Control System is included.
•      •  Three mobile carts are included to support furnace and sliding rail and allow flange sliding on table

Dimensions

1080 X 430 x 600mm

Net Weight

~70 kg

Shipping Dimensions

65x45x35" (x2 pallets)

Shipping Weight

540 lbs

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control (Optional)

• 
       •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
          immediate use.
•      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile,
          manage heat-treatment recipe, record and plot data for MTI furnaces.
•      •  A wireless remote control provides up to 300 meters operating range.
•      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for
          more information.

•      •  Note:
          The software is only compatible with MTI’s Yudian Temperature Controller
  
             
  
  

Compliance

• 
       •  UL ready
•      •  CE / MET / CSA Certification is available upon request, additional charges will apply

Application Notes


Click here to learn the installation of a gas regulator

• 
       •  Please click here to see our typical temperature profile calibration result at various temperature.
•      •  From 7/15/08, MTI calibrates each furnace by NIST certificated Omega CL3515R precision Temperature
          calibrator, and pre-set temperature off (SC value) in controller before shipping.
•      •  In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by
           yourselves. Please click here to learn how.
•      •  How to set up ceramic tube and vacuum flange for MTI Tube furnace.
•      •  Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure
          < 0.2 bar / 3 psi / 0.02 MPa
•      •  Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the
          pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
•      •  The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
          shocks to the tube
•      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used
          up to 1000°C
  
  

Operation Instructions