Furnace Feature
| • One high thermal conductivity Alumina flat sample holder (2"Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside quartz tube driven by a magnet manually to find desirable temperature position inside tube for evaporation or deposition.
- • One NIST certified precision temperature monitor is connected to thermal couple and sample
holder via a feedthrough on the vacuum flange.
- • One magnet is embedded inside thermal block, and another magnet is placed outside tube.
move the outside magnet can move the sample holder with thermal couple inside tube in or out
- • 30 segment programmable temperature controller is built in furnace to set up Max. working
temperature up to 1200oC at center of furnace
- • One small quartz crucible is included, which can be used to contain evaporation material or
please wafer on top for deposition based on your application.
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Furnace Power
| • 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when place order )
- • 1.5 KW
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Max. Temperature | 1200°C (<1 hour) |
Continuous Temperature | 1100°C ( continuous) |
Max. Heating Rate | <= 20 °C/min |
Heating Zone
| • Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
- • Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C
- • You shall measure furnace temperature profile for your own application before making film
growth. |
Temperature Controller
| • PID automatic control via solid state relay with 30 steps programmable
- • Built in Over Temperature and Thermocouple Failure Protection
- • Optional: The furnace may be operated by PC with installing a control module.
Please order a MTS02-B control module at extra cost.
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Temperature Accuracy | +/- 1°C |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Tube Size
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Vacuum Flanges | 2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port(click picture below to see details )
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Vacuum Level | 10-2torr (by mechanical pump) |
Fitting Ports & Optional Parts | • You may need a vacuum valve at the vacuum port end ( click picture left to order )
- • You may consider to order quick connecting flange at extra cost.
- • You may order multi-channel gas delivery system for DVD or CVD operation.
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Dimensions
| • With lid close: 1055mm (L) × 300mm(W) × 400mm(H) • With lid open: 1055mm (L) × 300mm(W) × 560mm(H)
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Net Weight | 22 Kg |
Shipping Package Size | 48''(L) x 24''(W) x 28''(H) |
Shipping Weight | 120 lbs |
Warranty
| One year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty.
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Laptop, software & WiFi Control(Optional)
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Compliance
| • CE Certified
- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
( please click marks below to learn details )
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Application Notes
Click here to learn the installation of a gas regulator | |
Operation Instructions | |