• 
       •  Double layer steel casing with air cooling.
•      •  Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.
  
  

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz

• 
       •  If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long
           with a temperature discrepancy of +/- 1°C.
•      •  If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a
           temperature discrepancy of +/- 1°C.
  
  

Temperature Controllers

Tube Size and Materials

Quartz Tube: 80 OD x 72 ID x 1000 L

Digital Vacuum Gauge

• 
       •  Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for
           vacuum measurements with the presence of corrosive gases.
•      •  Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
           range (10^^-5 ~ 1000 torr)
•      •  Optional: click the pic below to order Constant temperature control module.
  
  

         

• 
       •  Two stainless steel flanges with KF25 port, vacuum gauge and valves included.
•      •  Min. vacuum pressure achieved by a mechanical pump is 5.5 m-torr. (5.5x10^^-3 torr).
          The pressure can reach 10^^-5 torr using mechanical + molecular pumps.
•      •  Leaking rate is < 5 m-torr/min and stable vacuum pressure after 24 hours is < 2 torr.
•      •  Click the picture below to get details of both charts and data measured by CE certified vacuum
           meter:

          
  
  

Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation at extra cost. Please click the picture below to learn more:

 

Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.

Gas Mixing Control Station

• 
       •  Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of
          gas flowing rates (three different kinds of gases in total).

•      •  Four pressure meters are installed inside the mobile cart which is able to monitor three types of
          flowing gas pressure as well as the pressure of mixing tank.
  
  

Dimensions

• 
       •  Furnace: 550 x 380 x 520 mm
•      •  Bottom Mobile case: 600 x 600 x 597 mm Each
  
  

 Net Weight

~ 60 kg 

Shipping Weight

750 lbs

Shipping Dimensions

Three Pallets: 48"x40"x45" each

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control (Optional)

• 
       •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
           immediate use.
•      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
          profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
•      •  A wireless remote control provides up to 300 meters operating range.
•      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for
          more information.

•      •  Note:
          The software is only compatible with MTI’s Yudian Temperature Controller

             

Compliance

• 
       •  CE Certified
•      •  All electric components ( >24V) of the furnace are UL / MET / CSA certified, not including the
          gas mixing system, vacuum system, and plasma generator
•      •  The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.
          （ please click marks below to learn details )
  
  

Application Notes

Click here to learn the installation of a gas regulator

• 
       •  Please click here to see our typical temperature profile calibration result at various temperature.
•      •  From 7/15/08, MTI calibrates each furnace by NIST certificated Omega CL3515R precision
          Temperature calibrator, and pre-set temperature off (SC value) in the controller before shipping.
•      •  In order to obtain accurate temperature inside the tube furnace, you need to calibrate temperature by
           yourselves. Please click here to learn how.
•      •  How to set up a ceramic tube and vacuum flange for MTI Tube Furnace.
•      •  Tube furnaces with alumina tubes are designed for using under vacuum and low pressure
          < 0.2 bar / 3 psi / 0.02 MPa
•      •  The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
           shocks to the tube
•      •  Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the
          pressure to below 3 PSI for safe operation. 
          Click here to learn the installation of a gas regulator.
•      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
          used up to 1000°C
  
  

Operation Instructions