Furnace Construction |
• Double layer steel casing with air cooling. - • Built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
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Power Consumption | 2.5 KW |
Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz |
Maximum Temperature | 1200 °C |
Continuous workingTemperature | 1100 °C |
Maximum Heating Rate | <= 20 oC /min |
Heating Zone Length | 400 mm |
Constant Temperature Zone | 150mm (+/-1°C) |
Temperature Accuracy | +/- 1°C |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers
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• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired,
current limiting resistor.- • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- º Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop
package is available at the options bar. Click for the detail information about the
MTS02-Y software kit.
- º You may upgrade the temperature controller to the Eurotherm 3504 Temperature
Controller which is fully compatible with LabVIEW. This package includes a Eurotherm
3504 programmer, a communication cable (RS485 - USB) and a software CD.
Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
   
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Tube Size and Materials | Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm |
Digital Vacuum Gauge 
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• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed
for vacuum measurements with presence of corrosive gases.- • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
range (10^-5 ~ 1000 torr).
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Vacuum Sealing Flanges |
Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. Click the picture below to get details of both chart and data measured by CE cetified vacuum meter:
 Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
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Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Vacuum Pump
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Gas Flow Meter and Pressure Meter
| 1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3)Compact direct read flow meter, 25-250 cc/min.- • Four pressure meters are installed inside the mobile cart which are able to monitor three types of
flowing gas pressure as well as the pressure of mixing tank.
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| Valves | Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately. |
Dimensions
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• Furnace: 550 x 380 x 520 mm- • Bottom Mobile case: 600 x 600 x 597 mm
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Net Weight | ~ 60 kg |
Shipping weight | 200 lbs |
Shipping Dimensions | Two cases in one pallet: 45"x45"x35" /case |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional)
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Compliance |  CE Certified
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Application Notes
Click here to learn the installation of a gas regulator
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Operation Instructions |    |
