OTF-1200X-80-F3LV-PTFE is a CE certified splittable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10^-2 torr and mix 1-3  types of gases for CVD or diffusion. This furnace system features a PTFE gas system set to provide the anti-corrosive properties beyond stainless steel. The includes an anti-corrosive gauge, a vacuum pump with a cold trap, and the PTFE system. (Gas mixer and flange)

SPECIFICATIONS

Furnace Construction	•  Double layer steel casing with air cooling.      •  Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.      •  Anti-corrosive gauge to enable vacuum measurements with aggressive gases.      •  Vacuum pump with cold trap prevents aggressive gases reaching the pump.      •  PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.
Power Consumption	2.5 KW
Input Voltage	AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200 °C
Continuous workingTemperature	1100 °C
Maximum Heating Rate	<= 20  oC /min
Heating Zone Length	400 mm
Constant Temperature Zone	150mm  (+/-1°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controllers	•  PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired,         current limiting resistor.      •  30 programmable segments for precise control of heating rate, cooling rate and dwell time.      •  Please click here to learn why SCR is more accurate than SSC (Solid state relay).      •  Built in PID Auto-Tune function with overheating & broken thermocouple protection.      •  Over temperature protection and alarm allows for operation without attendant(s).      •  +/- 1 ºC temperature accuracy.      •  RS485 Communications Port. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
Tube Size and Materials	Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm
Digital Vacuum Gauge	•  Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed           for vacuum measurements with the presence of corrosive gases.      •  Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure          range (10^-5 ~ 1000 torr).
Vacuum Sealing Flanges	•  A set of PTFE flanges with both vacuum gauge and valve.
Vacuum Pump	•  156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4          torr.      •  Stainless steel hose tube is included for connecting to tube furnace.      •  A cold trap is included to capture corrosive material.
Gas Flow Meter and Pressure Meter	•  One PTFE three channel gas mixer is installed inside the mobile case to enable monitoring of gas          flowing rates.
Oxygen Monitoring (Optional)	•  An Oxygen Sensor can be purchased to monitor the oxygen level of gas(es) used in CVD systems          for preventing or reducing oxidation.
Dimensions	•  Furnace: 550 x 380 x 520 mm      •  Bottom Mobile case: 600 x 600 x 650 mm
Net Weight	~ 70 kg
Shipping weight	350 lbs
Shipping Dimensions	Two cases in one pallet:  45"x45"x35" /case
Warranty	One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control (Optional)	•  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for          immediate use.      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature          profile, manage heat-treatment recipe, record and plot data for MTI furnaces.      •  A wireless remote control provides up to 300 meters operating range.      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for         more information.      •  Note:         The software is only compatible with MTI’s Yudian Temperature Controller
Compliance	CE Certified
Application Notes Click here to learn the installation of a gas regulator	•  Please click here to see our typical temperature profile calibration result at various temperature.      •  From 7/15/08, MTI calibrates each furnace by NIST certificated Omega CL3515R precision        Temperature calibrator, and pre-set temperature off (SC value) in the controller before shipping.      •  In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by         yourselves. Please click here to learn how.      •  How to set up a ceramic tube and vacuum flange for MTI Tube furnace.      •  Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure          < 0.2 bar / 3 psi / 0.02 MPa      •  Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the         pressure to below 3 PSI for safe operation.          Click here to learn the installation of a gas regulator.      •  The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal          shocks to the tube      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used          up to 1000°C
Operation Instructions