Control Panel
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• All parameters of Vapor, ALD, and Gas flow are integrated into one mobile cart and controlled
by PLC via a 6" touch screen panel: - º Two-Channel ALD valve
- º For channels MFC gas delivery
- • Please click the picture below to see control interface
 
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ALD valve
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• Two ALD valves with pulse controller (min 10 ms duration )- • Capable of heating with thermal actuators
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Liquid-Vapor Generator
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• Automatic liquid-vapor generator is included and connects to ALD valve
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Rotation furnace
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• Max 1100ºC for continuous heating- • Two programmable precision digital temperature controllers with 30 segments.
- • Input power: 208 – 240V AC input, a single phase at max. 4KW
- • Rotation speed: 0 - 10 RPM
- • 4" quartz Tube as the drawing below
 Four Mixing Blades  Dimension
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Anti-corrosive Pressure Gauge
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• 3.8x10-5 to 1125 Torr measurement range- • Anti-corrosive, gas-type independent
- • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens process cycle
- • Easy to exchange plug & play sensor element
- • Click the picture to view detail spec.
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Vacuum Pump
( optional)
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• 10E-2 Torr vacuum can be achieved inside the processing tube- • The vacuum pump is not included, suggest you order a dry pump for CVD process by click
picture below
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More Bubbler
Optional
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• Click the picture below to order bubbler or evaporator for CVD, and below right ( 1-2) for
Constant pressure control module( Pic.right 2)- • Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature
at extra cost
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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• CE Certified- • NRTL or CSA certification is available upon requesat extra cost.
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Application
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Operation Instructions | |
