Furnace Structure
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• Double layer steel case with air cooling to ensure max. energy saving and furnace surface temperature
< 60 °C- • Heating Element: 1300ºC grade Fe-Cr-Al Alloy doped by Mo
- • 10 heating zones (120 mm L each) with 10 thermal couples & temp. controllers to create a various thermal
gradient. - • Accept processing tube from 1" - 4 " dia. x 2000 mm length
- • Split Cover for easy processing tube exchanging
- • Quick clamped vacuum flange for atmosphere control
- • The furnace can be in the position either horizontal or vertical.
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Power & Voltage | |
Working Temperature
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• 1200 °C Max. for < 1 hour under flowing gas- • 1100 °C under flowing gas
- • 1000 °C under vacuum < 1 torr
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Max. Heating Rate | <= 10 °C /min |
Quartz tube &
Thermal Block Placement
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• Quartz Tube: 100 OD x 96 ID x 2000 L mm (The tube is consumable, click picture below to order spare )- • Two fibrous alumina thermal blocks are included, which must be placed on two ends of inside tube
( click pic below right )
 
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Vacuum Flange
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• One pair stainless steel vacuum flange is included with quick assembling flange
(a outside clamp for quick installation)- º Left flange installed with needle valve with 1/4" pipe port for gas inlet (Pic below left)
- º Righ flange built in K25 port and Anti-Corrosive digital vacuum gauge to connect a vacuum pump
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Vaccum Level
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• 5x10-3 torr by mechanical vacuum pump- • 5x10-4 torr by turbo pump
- • Vacuum pump is not included. Please click picture below to order one
 
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Heating Zone
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• 10 digital temperature controllers are built-in to control each heating zone independently with 30 segments
programmable- • +/- 1 ºC temperature accuracy.
- • 10 pcs K type thermocouples (one for each zone).
- • RS485 Communications Port built in. and software included
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Options
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• You may add a multi-channel gas delivery system for CVD or atmosphere control applications
(click PIC below-left to order)- • You may consider a pressure control unit to keep constant pressure (click picture below right to order)
 
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Dimension
(click to see detail )
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Net Weight | |
Warranty
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One-year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings, and heating
elements are not covered by the warranty, please order the replacement at related products below.)
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Laptop, software & WiFi Control (Optional)
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Compliance |
• CE Certified- • NRTL (UL61010) or CSA certification isavailable at extra cost.
 
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Notice
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Warning
Click here to learn the installation of a gas regulator
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• The tube furnaces with quartz/mullite tube are designed for using under vacuum and low pressure < 0.2 bar
/ 3 psi / 0.02 MPa- • Attention: A two stage pressure regulator must be installed on a gas cylinder to limit the pressure
to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • * Vacuum pressures may only be safely used up to 1000°C
- • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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Temperature Control Instructions |
  
Installation Temperature Control
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