Furnace Structure
| - º 4.33" O.D x 4.05" I.D x 29.13" Length quartz tube
- º 1200ºC Max. working temperature
- º Water cooling flange on right-side is slidable for easy sample loading
- º Water cooling flange on left-side is for gas inlets, and customized feedthrough is
available upon request.
- • Split cover with Interlock protection, cut the power if door open during furnace heating process.
- • Please click picture below for more details:
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| Rated Voltage | Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug) |
| Power Consumption | Max. 3600 W (20 A breaker required) |
Heating Zone |
• Heating zone length: 440 mm- • Constant temperature zone: 100 mm
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Working Temperature
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• Max heating temperature: 1200°C ( < 30 minutes )- • Continuous working temperature: 200~1100°C
- • Max heating & cooling rate: 20°C/min
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Temperature Control
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• Digital controller with PID/self-tuning function and 30 segments programmable- • Thermocouple: K type thermocouple, which is inserted from the right side flange and
connected to the temperature controller. - • Control accuracy: +/- 1°C
- • Software for PC control furnace is available as optional (click picture below to order)
- • The new version of PC module is now compatible with Lab View 05/08/2014
 
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Vacuum and Gas Sealing & Flange |
• Right flange:- º Water cooling structure with 12mm quick connector to prevent sealing o-ring from
melting (water cooler is not included, please click water chiller to order) - º KF25 vacuum fitting (to vacuum pump, please click to order pump, vacuum hose,
valve and sealing gasket) - º Slidable for customer to easily and fast push/pull in/out sample
- º One quartz wafer holder ( 3" Dia. max. ) is built in the flange with heating radiation
block for CVD growth on thin substrate - º An anti-corrosive capacitance diaphragm gauge is included
- • Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
- º Two separate 1/8'' fitting on the flange for any gas into the CVD furnace
- º and customized feedthrough is available upon request.
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Net weight
| 100kg
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Dimensions
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• Standard: 48"L X 18"W X 23"H- • Maximum: 66"L X 18"W X 32"H (Lid open and right-side flange slided out)
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Warranty
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• One year limited warranty for electrical parts. ( Consumable parts such as processing tubes,
O-rings, and etc are not covered by the warranty)- • You may order replacement quartz tube here: EQ-QZTube-RTP
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Laptop, software & WiFi Control(Optional) | |
Compliance |
• CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra
cost. （ please click marks below to learn details )
 
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Warning
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• The tube furnaces with quartz tube are designed for using under vacuum and low pressure
<0.2 bars / 3 psi / 0.02 Mpa- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation.
Please click here to learn how to install the gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C - • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
shocks to the tube
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Operation Instructions
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Application Notes |
You may add a scalable below on sliding flange at additional cost to achieve fast heating and cooling under controlled atmosphere or vacuum. Also, you can add electric motor driven flange at the extra cost similar to the furnace below-right.
 
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