Furnace Structure
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Chamber Interior
| • Five sides heating, e.g. left, right, bottom, back, and front, to achieve better temperature uniformity than three sides heating.- • Energy-saving 1500 grade fibrous alumina insulation
- • High purity and reflective Al2O3 coating for max energy saving.
- • Kanthal 1350°C grade Fe-Cr-Al resistance heating wire
- • Heated chamber: 400x 400x 400 mm (~ 16"x16" x16"), 64 Liter
- • Optional:500x500x500 mm ( 125 L ) heating chamber is available upon request
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Working Temperature & Constant Temperature Zone
| • Continuous Working Temperature 1100° C- • Maximum Working Temperature 1200°C (< 1 hrs)
- • Constant temperature zone:
- º +/- 1°C within center 250 mm cubic zone
- º +/- 5°C within center 300 mm cubic zone
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Maximum Sample Loading
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Temperature Controller
| • FA-YD518P-AG temperature controller is included.- • Proportional–integral–derivative control (PID control) and auto-tune function
- • 30 segments programmed with ramping, cooling and dwelling steps
- • Built-in over-temperature alarm and thermocouple failure alarm
- • +/- 1 ºC temperature control accuracy
- • Default DB9 PC communication port
- • MET Certified
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The temperature controller (optional)
| • MTS02-Y Temperature control software kit (for YD518P series controllers) + brand new laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. - • You may upgrade the temperature controller to the Eurotherm Temperature Controller which is fully
compatible with LabVIEW with +/- 0.1ºC accuracy. This package includes a Eurotherm programmer, a communication cable (RS485 - USB) and a software CD. Click the pic left to view the full spec of the Eurotherm temperature controller.
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Thermocouple
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Heating Rate
| • < 10 °C / min recommended- • 20 °C/ min Max.
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Temperature Accuracy | |
Gas flow control & Vacuum Valve
| • Two larger flowmeters are installed in the front panel of the furnace to allow two types of gas mixing and flowing at the same time - • One KF 25 vacuum port is installed in left of furnace to remove air by vacuum pump before filling gas
- • One heavy duty vacuum pump ( CE certified ) built in bottom furnace. You may choose a UL certified
pump at extra cost
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Water Cooling
| • A 16L/min recirculating water chiller is included for cooling furnace- • Short water power off and Over temperature alarm built-in
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Working Gases | • All type inert gases such as N2 and Ar at《 0.03Mpa.- • Pure oxygen gas 《 0.03Mpa. but need modifying internal connection wire for anti-oxidation, please call us
in advance if you use O2 gas - • Low vacuum 10-1 torr due to
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Power & Working Voltage
| • 9.5 KW, 208 - 240V single phase, 50/60Hz - • Three-phase, AC 380V - 460V available upon request.
- • Note: Power cable included, but without a plug. Please install a plug by your own
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Compliance
| • CE Certified- • NRTL (UL61010) or CSA certification is available at extra cost.( please click mark below to learn details
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Dimension & Net Weight
| • H2050mm X W 1280mm x 1200 L- • Net weight: 476 Kg
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Shipping Weight & Dimension
| • 2000 lbs- • 58" x 54"x 91"
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Warranty
| • One-year limited warranty with lifetime support- • We reserve the right to upgrade the furnace structure for better performance without notice
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Demo Video Operation Instruction
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Warning & Application note
| • Max pressure of this furnace is 7.5 PSI ( 0.5 atm ). You must install a pressure regulator on your gas tank to avoid over-pressured. Click here to learn the installation of a gas regulator.- • This furnace also can be modified as a larger CVD furnace system with a proper gas delivery system.
Please contact us to discuss your special application. - • This furnace can not use corrosive gasses which react with FeCrAl alloy heating element!
- • Toxic, corrosive or flammable gasses are not recommended for use with this furnace. Please consult with
our engineering team for more details - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure
for safe operation. Click here to learn the installation of a gas regulator.
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