Furnace Structure
| The tube furnace has three layers
- 1. Heating Layer: Center alumia tube ( 20OD x 25 ID x 1200 L , mm ) with heating coil
- 2. Vacuum layer: Quartz tube ( 80 mm dia.x 1000 mm L ) with vacuum sealed and flange
for thermal insulation - 3. Water cold layer: outer quartz tube ( 100 mm dia. x1000 mm L ) to keep outside wall < 30ºC
- 4. Outer Tube: 90mm O.D x 58mm I.D
- 5. Inner SiC Sheath: 36mm O.D
customized size tube is available upon request
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Power
| • 208 - 240 VAC, single phase - • 2000W
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Working Temperature
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Heating Rate | - • Max. Heating Rate: 10°C /min
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Heating Zone | • Heating Zone Length: 1000 mm
- • Constant Temperature Zone: 700 mm within +/- 2oC
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Temperature Controller
| • PID automatic control and auto-tune function.- • 30 programmable segments for precise process
- • Built in protection for overheated and broken Thermal couple.
- • Temperature Accuracy: +/- 1 °C
- • K-type thermal couple
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Vacuum Flange (Sold Separately)
| • Special flange for three layers tube is included- • 1" flange is included for center tube
- 1" Flange Set
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Fitting Ports (Sold Separately)
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Vacuum Pressure
| • Limited by vacuum pump- º 50 mtorr can be achieved by mechanical pump
- º 10^-5 torr can be reached by molecular pump
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Digital Pressure Gauge (optional)
| A gas-type independent (above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by incorrect reading of gas pressures due to gas-type dependency. (Please click picture left for details) |
Shipping Package Dimensions | |
Shipping Weight | |
Warranty | One year limited warranty with lifetime support. |
Compliance | • CE Certified- • All electric parts are UL / MET / CSA certified
- • The furnace is ready to pass UL or CSA certification (UL61010 or SPE1000) on customer side
at customer cost.
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Application Notes
Click here to learn the installation of a gas regulator
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
- • Attention: A two stage pressure regulator must be installed on the gas
cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C - • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal
shocks to the tube - • Please click here to see our typical temperature profile calibration results at various temperatures.
- • In order obtain accurate temperature inside tube furnace, please click here to learn how to
calibrate the temperature on your own. - • How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
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Operation Instructions | |