Split Tube furnace
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| • Output Power: 5 -300W adjustable with ± 1% stability- • RF frequency: 13.56 MHz ±0.005% stability
- • Reflection Power: 200W max.
- • Matching: Automatic
- • RF Output Port: 50 Ω, N-type, female
- • Noise: <50 dB.
- • Cooling: Air cooling.
- • Power: 208-240VAC, 50/60Hz
- • Note: This RF power supply can accept 50 - 80 mm Max. quartz tube
by changing flange
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Anti-corrosive Pressure Gauge
| • 3.8x10-5 to 1125 Torr measurement range- • Anti-corrosive, gas-type independent
- • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens process cycle
- • Easy to exchange plug & play sensor element
- • Click the picture to view detail spec
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Vacuum Pump and valve
| • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.- • KFD25 adapter and stainless steel pipe are connected between pump and tube flange with
precision ball valve - • Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
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Optional Oilless Pump
| Please order the oilless pump for zero contamination:
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Mass Flowmeter EQ-GSL-LCD | • 4-Channelled Gas Mixing- • Made of 316 stainless steel valve
- • Gas mixing tank: Φ80X120mm
- • 600mm(L) x 745mm(W) x 700mm(H)
- • 6" color touch screen control panel to make parameter setting at easy.
- • Touchscreen Control and PC remote switchable.
- • 23W per channel
- • AC 220V/50Hz Single phase
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Temperature Controller | • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.- • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- º Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop
package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- º You may upgrade the temperature controller to the Eurotherm 3204 Temperature
Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.
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Optional
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Overall dimensions
| • Furnace: 550mm(L) x 380mm(W) x 520mm(H) - • 2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
- • Net weight: 220 lbs
- • Shipping weight: 350 lbs
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Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
Laptop, software & WiFi Control (Optional)
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Compliance | • CE Certified- • All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system,
vacuum system, and plasma generator - • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
( please click marks below to learn details )
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Patten Number: ZL-2011-2-0355777.1 |
Operation Instruction
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Warning
Click here to learn the installation of a gas regulator
| • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to
limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C - • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
shocks to the tube - • MTI reserves right to modify PECVD design at any time without notice but promise that
quality will meet the specifications above
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Shipping Dimensions | • Pallet #1: 48" x 40" x 65"- • Pallet #2: 48" x 40" x 40"
- • Pallet #3: 48" x 40" x 40"
- • Pallet #4: 48" x 40" x 40"
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Total Shipping Weight | 1100 lbs |