Structure
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• Aluminum casting case to keep spinning stable- • Drainage outlet and vacuum pump connector are on back panel
- • One filter is included in standard package. It is used to connect the pump and coater for
preventing waste water from flowing into the pump - • One oilless pump is included in the standard package.
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Chamber & Vacuum Chuck
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• Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square- • Spinning chamber is made of PP which is corrosive resistant
- • One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers
- • 1 piece of Adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates
or wafer with size < 6" - Place the irregularly shaped substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction
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Spin Speed
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• Digital control panel with two programmable segments of different spin times and speeds- • 500 - 6000 RPM adjustable spinning speed for each segment
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Liquid Injecting
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• 20mL syringe is used to contain the coating material- • The syringe holder height can be adjusted and rotated freely along the support rod
 - Pic 1  - Pic 2
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Optional |  - Pic 1  - Pic 2  - Pic 3
 - Pic 4  - Pic 5
- • Heating cover with digital temperature controller up to 100°C (max. duration < 1 minute) is
available at extra cost ($2495) , which allows sample drying in-situ during and after coating.
Click demo video below for detail
  - Pic 7
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Input Power |
• AC 110V/220V selectable- • There is a built in power socket on the right side of the VTC-200 spin coater. It is used to
supply power for the vacuum pump. The output voltage of this power supply depends on the
input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC
110V power socket, then the built in power socket will supply AC 110V)
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| Motor Power | 90VDC , 150W |
Product Dimensions
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 500mm(L) x 400mm(D) x 400mm(H)
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| Net Weight | 20 kg (44 lbs) |
Compliance |
• CE Certified- • NRTL certification is NOT available temporary.
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Warranty |
• One year limited with lifetime support
- • Rusting and damage due to improper storage condition or maintenance are not covered by
warranty
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Operation Manual
&
Demo Video |
 
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Application Notes | |
Warnings |
• Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the
motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the
bow/base.- • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid
overflowing during the operation. - • For more details about the cleaning procedure, please review the cleaning instruction for the spin
coaters.
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| Shipping Dimensions | 45"(L) x 30"(W) x 30"(H) |
| Shipping Weight | 46 kg (100 lbs) |
