Model
| OTF-1200X-II-50-PEC4SL
| OTF-1200X-II-80-PEC4SL | OTF-1200X-III-5-PEC4SL |
Tube Size (Please select in option bar)
| 2" (50mm) OD x 1.7" ID x 71" Length | 3.14" (80mm) OD x 2.83" ID x 71'' Length
| 5" (130mm) OD x 4.8" ID x 79'' Length |
Furnace
| OTF-1200X-II-50 | OTF-1200X-II-80 | OTF-1200X-III-S-130 |
Features
| • Two programmable precision temp. controllers with 30 segments.- • Two separately controlled Heating Zones:
- º 200mm length for each heating zone
- º 400mm total in heating length
- º 250mm constant central temperature heating area if both zones were heated at the same temperature
| • Two programmable precision temp. controllers with 30 segments.- • Two separately controlled Heating Zones:
- º 200mm length for each heating zone
- º 400mm total in heating length
- º 250mm constant central temperature heating area if both zones were heated at the same temperature
| • Three programmable precision temp. controllers with 30 segments.- • Three separately controlled Heating Zones:
- º 200mm length for each heating zone
- º 600mm total in heating length
- º 480mm constant central temperature heating area if all zones were heated at the same temperature
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Plasma RF Power Supply
| • Output Power: 5 -300W adjustable with ± 1% stability.
- • RF frequency: 13.56 MHz ±0.005% stability.
- • Reflection Power: 200W max.
- • Matching: Automatic
- • RF Output Port: 50 Ω, N-type, female
- • Noise: <50 dB.
- • Cooling: Air cooling.
- • Power: 208-240VAC, Single Phase, 50/60Hz
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Anti-corrosive Pressure Gauge
| • 3.8x10-5 to 1125 Torr measurement range
- • Anti-corrosive, gas-type independent
- • High accuracy and reproducibility at atmosphere for reliable
atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens
process cycle
- • Easy to exchange plug & play sensor element
- • Click the pic to view detail spec.
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Vacuum Pump Station and Valves
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Mass Flowmeters & Gas Mixing Station
| It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control in the gas flow rate of each independent channel.
- • Working Temperature: 5~45 ºC
- • Max. Pressure: 3x106 Pa
- • Accuracy: ±1.5% FS
- • Liner: ±(0.5-1.5)%F.S.
- • Duplicate accuracy: ±0.2%F.S.
- • Controlling Range:
- º Controller 1: 0~100 SCCM
- º Controller 2: 1~199 SCCM
- º Controller 3: 1~199 SCCM
- º Controller 4: 1~499 SCCM
- • Click picture left-below to order bubbler or evaporator for CVD,
constant pressure control module
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Heating & Cooling Rates
| • RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here )
- • In order to achieve Max.heating rate, the user must preheat furnace
to desired temperature , then slide the furnace to the sample zone of the tube - • In order to achieve the Max. cooling rate, move the heated furnace
from hot zone to cold zone
Heating Rate: 15°C/sec (RT - 150°C); 10°C/sec (150°C - 250°C); 7°C/sec (250°C - 350°C); 4°C/sec (350°C - 500°C); 3°C/sec (350°C - 550°C); 2°C/sec (550°C - 650°C); 1°C/sec (650°C - 800°C); 0.5°C/sec (800°C - 1000°C); | Cooling Rate: 15°C/sec (1000 - 950°C); 10°C/sec (950°C - 900°C); 7°C/sec (900°C - 850°C); 4°C/sec (850°C - 750°C); 2°C/sec (750°C - 600°C); 1.5°C/sec (600°C - 500°C); 1°C/sec (500°C - 400°C); 0.5°C/sec (400°C - 300°C); |
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Overall Dimensions |
2000mm L X 800mm W X 1500mm H
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Shipping Weight & Dimension
| Shipping weight: 1500lbs
Total 4 Pallets:
- • 48"x40"x60"
- • 48"x40"x40"
- • 48"x40"x40"
- • 81"x52"x40"
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Warranty
| One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control (Optional)
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Compliance
| • CE Certified- • All electric components ( >24V) of the furnace are UL / MET / CSA
certified, not including the gas mixing system, vacuum system, and plasma generator
- • The furnace is ready to pass TUV(UL61010) or CSA certification at
extra cost.( please click marks below to learn details)
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| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
- • The flow rate for gasses should be limited to < 200 SCCM (or 200
ml/min) for reducing thermal shocks to the tube
- • Click here to learn How to set up quartz/ ceramic tube and vacuum
flange for MTI Tube furnace.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- • MTI reserves the right to modify its PE-CVD design at any time without
notice but promises quality in future designs meet and exceed the specifications above.
- • For operating PECVD system with tube size larger than 4", please
always keep more than 1-meter distance from the plasma source after the plasma generator starts working
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Operation Insturctions
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