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Doped GaN Template on Sapphire
Fe-doped GaN(N-type ) Templates on Sapphire(0001) 2"Dia ,Nominal GAN, Thickness 5 micron+/-1.5 um ,R:6-8 ohm.cm
Specification
• Research Grade , about 90 % usable area - • Fe-doped GaN template, N-type, 2” in diameter
- • Nominal GaN Thickness: 5 um +/- 1um
- • 2” in dia, N(Fe-doped)
- • Concentration: N/A
- • Resistivities: 6-8 Ohm-cm
- • Front side surface: As grown
- • Backside surface: Substrate as received
- • Polarity: Ga-face
- • Typical Macro Defect Density:<10 cm^-2
- • Sapphire Substrate, 2”. C-plane, 0.2 degrees offcut toward an a-plane direction,
- • One sides polished
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