Structure & Features
| • 280 mm O.D. x 260 mm I.D. x 310 mm Height quartz chamber for easy cleaning and sample loading - • 2" Dia rotatable evaporating sources for the uniform
film coating
- • Tungsten coil heater and alumina crucible for high-
temperature coating up to 1700 ºC
- • Precision temperature control with 30 programmable
segments and +/- 1 ºC accuracy
- • A high vacuum can be achieved up to 1.0E-5 Torr via
optional turbopump
- • Gas flow port and valve are built in for chamber
purge and CVD possibility
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Input Power
| • Input voltage: AC 208 - 240 V 50/60 Hz, single phase ( 110V AC is available via 1500W transformer )
- • Input Power: 1,200 W
- • output power:: 12 V, and 30 A max current.
Recommended working current <30 A
- • Power cable included without plug
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Temperature Control & Heaters
| • Four Alumina Evaporating Crucibles with 3 mL each capacity. Four sources cannot be used at the same time. The multilayers deposit would be done one by one.
- • Tungsten coil heater with a thermocouple is built in
at the bottom of alumina crucible (for temperature control (PIC. 1). Please refer to the left picture for dimensions - º Standard S type thermocouple (included
and installed) - heating from 200 ºC - 1500 ºC (PIC. 2) - º Optional B-type thermocouple (at extra
cost) - heating from 1200 ºC - 1700 ºC
- • One digital temperature controller with 30
programmable segments and +/- 1 ºC accuracy (PIC. 3)
- • The time settings of temperature controller are in
seconds. Recommend to limit the temperature heating / cooling rate to 0.3 ºC/s (or 20 ºC/min) below 1200 ºC, and limit to 0.15 ºC/s (or 10 ºC/min) from 1200 - 1700 ºC
- • For continuous heating above 1300 ºC, please limit
the operation time to less than 1 hour to preserve the service life of bottom flange O-ring
- • For fast coating up to 2000 °C, such as needed in
Carbon coating, the user can remove thermocouple, alumina thermal block, and alumina crucible, load evaporation material directly into the tungsten coil heater, and use current manual control mode (PIC. 4)
- • Four alumina crucibles (up to 1700 ºC) and two
tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts
PIC 1 PIC 2
PIC 3 PIC 4
PIC 5
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Rotatable Sample Holder
| • One 50 mm Dia. rotatable sample stage and its shutter are installed on top flange.- • Rotating speed: 5 rpm
- • The distance from sample holder to evaporation
source is adjustable from 40 mm to 85 mm - • Please click here to learn how to adjust the position
of the sample stage.
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Film Thickness Analysis System (optional) | Pic.1
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Vacuum
| • KF25 vacuum port is installed to connect to a vacuum pump
- • The highest vacuum may reach <1E-5 Torr by
pumping overnight with optional Turbomolecular pump
- • A vacuum pump is required for coating. Please
choose from the following Product Options
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Gas Inlet | • 1/4 tube fitting is built in for chamber purge or forming gas processing
- • One needle valve is built-in to control gas flowing
rate
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Optional |
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Overall dimension
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Quartz Chamber Dimension
| O.D.:280mm ( 11") I.D.: 260mm ( 10.2") Length: 310mm ( 12.2") Please click here to order the Quartz Chamber replacement. |
Compliance |
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Warranty | - One year limited warranty with lifetime support
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Net Weight | |
Shipping Weight & Dimensions | |
Operation Instruction
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Application Notes
| • To achieve the high vacuum required for the evaporation of some materials, user can
- º Check the chamber, O-ring, and flange for
any particle, fiber, or scratch. Use lint-free tissue wetted with isopropyl alcohol (IPA) to wipe clean the surface
- º Use heater tape to bake the chamber at
150 ºC and pre-heat the coil heater and crucible at 500 ºC while pumping with the optional turbopump for at least 2 hours
- º Pump the chamber overnight without
heating if a vacuum higher than 1.0E-5 Torr is needed
- • DO NOT start the heating program or manually
ramp up the current without an enclosed chamber and a vacuum!
- • DO NOT release the vacuum or stop pumping when
the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 ºC!
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