• 
       •  6" OD x 10”H quartz chamber for easy cleaning and sample
          loading
•      •  2" Dia rotatable sample holder for uniform film coating
•      •  Tungsten coil heater and alumina crucible for high-
          temperature coating up to 1700 ºC
•      •  Precision temperature control with 30 programmable
          segments and +/- 1 ºC accuracy
•      •  High vacuum can be achieved up to 1.0E-5 Torr via optional
          turbopump
•      •  Gas flow port and valve are built in for chamber purge and
          CVD possibility
  
  

• 
       •  Input voltage:  208 - 240 VAC 50/60 Hz, single phase
•      •  Input Power: 500 W
•      •  Output Power: 40 A max current. Recommended working
          current <20 A
•      •  Power cable included without the plug

• 
       •  Tungsten coil heater with a thermocouple is built in at the
          bottom of alumina crucible (for temperature control (PIC. 1).
          Please refer to the left picture for dimensions
  
  
•          º  Standard S type thermocouple (included and installed)
              - heating from  200 ºC - 1500 ºC (PIC. 2)
•          º  Optional B-type thermocouple (at extra cost)
             - heating from 200 ºC -  1700 ºC
  
  
•      •  One digital temperature controller with 30 programmable
          segments and +/- 1 ºC accuracy (PIC. 3)
  
  
•      •  The time settings of temperature controller are in seconds.
          Recommend to limit  the temperature heating / cooling
          rate to 0.3 ºC/s (or 20 ºC/min) below 1200 ºC,
          and limit to 0.15 ºC/s (or 10 ºC/min) from 1200 - 1700 ºC
  
  
•      •  For continuous heating above 1300 ºC, please limit the
          operation time to less than 1 hour to preserve the service
          life of  bottom flange O-ring
  
  
•      •  For fast coating up to 2000 °C, such as needed in Carbon
          coating, the user can remove thermocouple, alumina
          thermal block, and alumina crucible, load  evaporation
          material directly into the tungsten coil heater, and use
          current manual control mode (PIC. 4)
  
  
•      •  Four alumina crucibles (up to 1700 ºC) and two tungsten
          coil heaters are included. Please refer to the Optional
          section for ordering spare parts
  
  

 

 

• 
       •  One 50 mm Dia. rotatable sample stage and its shutter are
          installed on top flange.
•      •  Rotating speed: 5 rpm
•      •  The distance from the sample holder to evaporation source
           is adjustable from 40 mm to 85 mm
•      •  Please click here to learn how to adjust the position of the
          sample stage.

• 
       •  Precision quartz thickness sensor is optional, please click pic.
          1 & 2 for details. It can be built into the chamber to provide
          instant film thickness monitoring with accuracy
          of 0.10 Å. LED Display Unit outside the chamber can:
• •          º  Input coating material info based on the included
                database
  •          º  Display total coating thickness and coating speed
•      •  Precision Thin Film & Coating Analysis Systems -
         EQ-TFMS-LD is available at extra cost, please click pic.2
          for details
  
  

                    

           Pic.1               Pic.2                 Pic.3

• 
       •  KF25 vacuum port is installed to connect to a vacuum pump
  
  
•      •  The highest vacuum may reach <4.0E-6 Torr by pumping
           overnight with optional Turbomolecular pump
  
  
•      •  A vacuum pump is required for coating. Please choose from
          the following Product Options
  
  
•          º  No vacuum pump. Anti-Corrosive Capacitance
              Diaphragm Gauge is included for vacuum up to
             1.0E-6 Torr
  
  
•          º  Double Stage Rotary Vane Vacuum Pump with vapor
               trap to eliminate the oil mist, which can reach vacuum
               up to 1.0E-2 Torr for evaporating noble metallic
               materials, such as gold, silver, and organic materials.
              Anti-Corrosive Capacitance Diaphragm Gauge is included
  
  
•          º  Compact Turbomolecular Vacuum Pump System is able to
               provide  vacuum level up to 2.0E-5 Torr for evaporating
               oxygen sensitive materials, such as Al. Mg, Li, etc. A
               combined Pirani and cold cathode  gauge are included
               with pump to measure vacuum up to 1.0E-8 Torr    
  
  

  Option 1	Option 2	Option 3

• 
       •  1/4 tube fitting is built in for chamber purge or forming gas
           processing
•      •  One needle valve is built-in to control gas flowing rate
  
  

• 
       •  Extra alumina crucible and tungsten coil heater can be
          ordered at MTI at extra cost (Click the pictures below)
  
  
•      •  Total 4 evaporating sources crucibles could be used to
          deposit multiple different  materials to grow multilayers
           one by one in   the same chamber atmosphere.
  
  
•    
  
  

• 
       •  CE Certificate
•      •  Click here to understand the certificate and condition.
  
  

                       

•      •  One year limited warranty with lifetime support

•      •  50 kg

•      •  130 lbs, 40" x 30" x 32"

• 
       •  To achieve the high vacuum required for the evaporation of
          some materials, user  can
• \
•          º  Check the chamber, O-ring, and flange for any particle,
              fiber, or scratch.
              Use lint free tissue wetted with isopropyl alcohol (IPA) to
              wipe clean the surface
• \
•          º  Use heater tape to bake the chamber at 150 ºC and
              pre-heat the coil  heater and crucible at 500 ºC while
              pumping with the optional turbo pump for at least 2 hours
• \
•          º  Pump the chamber overnight without heating if a
               vacuum higher than 1.0E-5 Torr is needed
  
  
•      •  The coater can be placed into an Ar or N2 gas glove
            box for thermal  evaporation of humility & oxygen
           sensitive materials, such as Li metal. Click
          the left picture for a demo in MTI's VGB-6OP glove box
  
  
•      •  DO NOT start the heating program or manually ramp up
          the current without an enclosed chamber and a vacuum!
  
  
•      •  DO NOT release the vacuum or stop pumping when the
          coater is in evaporation  operation! During the heater cool
          down, stop pumping or release the vacuum ONLY when the
           temperature is decreased below 100 ºC!
  
  

EQ-SPC2-ARSC