Rotary & Rocking Tube Furnace (2" - 15" tube)

1200ºC Max. Two-zone Microwave Plasma Enhanced CVD (MPECVD) Rotary Tube Furnace - OTF-1200X-R-II-MPECVD

1200ºC Max. Two-zone Microwave Plasma Enhanced CVD (MPECVD) Rotary Tube Furnace - OTF-1200X-R-II-MPECVD

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Product Name 1200ºC Max. Two-zone Microwave Plasma Enhanced CVD (MPECVD) Rotary Tube Furnace - OTF-1200X-R-II-MPECVD
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Specification

Split Tube Furnace
  • Input voltage: 110/220 VAC, single-phase. 50/60 Hz.
  • Input power: 1.2 kW.
  • Maximum working temperature: 1200 °C (< 60 min).
  • Continuously working temperature: 1100 °C.
  • Maximum heating rate: 10 °C /min.
  • 30 segments programmable precision digital temperature controller.
  • Dual 4" (100 mm) heating zone.
  • Constant Temperature zone: 100 mm within ±2 °C if two zones at same temperature.
Temperature Controller


  • Proportional integral derivative (PID) control.
  • Built in temperature and thermocouple failure protection.
  • Default D89 BC communication port.
  • Temperature accuracy: ±1 °C.
  • Heating elements: Fe-Cr-Al alloy doped by Mo.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
    • You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.           
Tube Description
  • 2" fused quartz processing tube with mixing blade in center.
  • Tube length: 1100 mm.
  • Rotation speed: 0 ~ 5 rpm.
                    Contact us for other tube sizes options.
 Microwave Magnetron
  • Input voltage: 110 VAC, single-phase.
  • Input power: 600 W (Optional: 1200W, 2100W and 3500W microwave generators are available upon request, additional cost will be applied)
  • Frequency: 2.45 GHz
  • Continuously working time: 30 mins.
  • Air cooling.
  • Equipped with an aluminum protective shield and an AC fan to minimize the microwave leak.
Pressure Sensor
Vacuum Pump

  • Working voltage: 110 VAC/60 Hz or 220 VAC 50/60 Hz, single phase.
  • Working power: 375 W.
  • 156 L/min rotary vane vacuum pump.
  • Vacuum capability: 10 ^ -3 Torr.
Product Dimensions
  • Product dimension: 1500 × 500 × 600 mm.
  • Furnace: 640 × 300 × 400 mm.
  • Microwave generator: 360 × 300 × 600 mm.
Warranty
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  •    



Compliance
  • CE Certified
  • NRTL (UL61010) or CSA certification ia available at extra cost.( please click marks below to learn details )
             
Patten Number: ZL-2011-2-0355777.1
Operation Instruction


Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above