Rotary & Rocking Tube Furnace (2" - 15" tube)

5" Rotary CVD Tube Furnace with Three Heating Zones at 1200°C Max. - OTF-1200X-III-R5L

5" Rotary CVD Tube Furnace with Three Heating Zones at 1200°C Max. - OTF-1200X-III-R5L

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Product Name 5" Rotary CVD Tube Furnace with Three Heating Zones at 1200°C Max. - OTF-1200X-III-R5L
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Specification

urnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy efficiency
  • DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be electrically tilted up to 30° C
  • Split cover enables faster cooling and easy operation.
  • All electric components are UL or Met recognized and ready to pass any safety test worldwide
Heating Zone length
  • Three zones: (600mm, 24" in total)
    • Zone 1: 150 mm  
    • Zone 2: 300mm  
    • Zone 3: 150 mm
  • Constant temperature zone: 450 mm within +/-2ºC if two zones are at the same temperature.
Processing tube & Flange
  • Fused quartz tube (one is included)
  • Dimension:  130 mm O.D. x 120 mm I.D. x 1200 mm L + 60 OD mm (two ends )
    • Click the pics below to see details about the furnace's processing tube
          Four Mixing Blades                         Dimension
  • One pair of 60mm SS sealing flange with needle valves and a rotatable gas connector is included for immediate use      
Gas Fittings
 
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

  • 1100°C for continuously

  • 1200°C Max for < 1 hours

Temperature Controllers        
  • Three PID digital temperature controllers with 30 programmable segments
  • RS485 port is built in to connect PC for remote control         
Temperature Uniformity
 +/- 1°C in heating Zone
Thermocouple
 
Three Omega K type 3mm OD x 6" L with high temperature tolerance (220°C) connector
Tube rotating Speed
0 - 10 RPM variable (Gear reduction ratio 1:150, torque 10Nm)
Furnace tilt angle
0 - 30°
Chamber pressure
10-2 torr
 Production yield
 2 kg per batch
 Power
 4 KW Max
 Voltage
 208 - 240V single phase (30 A Breaker required)
 Warranty & CertificateOne year limited warranty (consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, replacements are available at related products below.) 
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  •    

Compliance
  • CE Certified
  • NRTL (UL61010)  or CSA certification is available upon request at extra cost. 
                
 Furnace dimension

With Lid OpenWith Lid Closed
TiltAt 0°34°34°
Length60"60"60"60"
Width35"35"24"24"
Height66.5"74"58"68"
 Net Weight
   130 kg  
 Shipping Weight &  Dimension
  • 600 lbs
  • 48"x40"x80"
Operation Video

     

Application Notes
Warnings
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C