Furnace Construction | - Double shell casing with three cooling fans
- High purity Alumina fibrous insulation for max. energy efficiency
- DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
- The furnace can be electrically tilted up to 30°
- Split cover enables faster cooling and easy operation.
- All electric components are UL or Met recognized and ready to pass any safety test worldwide
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Heating Zone length | |
Processing tube & Flange
|  Four Mixing Blades  Dimension
- One pair of 60mm SS sealing flange with needle valves and the rotatable gas connector is included for immediate use
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Gas Fittings
 | Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting: Elbow Push-in connector for 12mm O.D tube |
Max. Working Temperature | 1100°C for continuously 1200°C Max for < 1 hours
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Optional Temperature Controllers  | - Three PID digital temperature controllers with 30 programmable segments
- RS485 port is built in to connect PC for remote control
- Please click the picture to the left for ordering the software and chip at extra cost.
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Temperature Uniformity | +/- 1°C in heating Zone |
Thermocouple
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Tube rotating Speed | 0 - 10 RPM variable |
Furnace tilt angle | 0 - 30° |
Chamber pressure | 10-2 torr |
Production yield | 2 kg per batch |
Vacuum and Filters | - One heavy-duty mechanical vacuum pump with Exhaust Filter are included
- One cold vacuum trap is included to avoid CVD contaminating the vacuum pump.
 
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Gas Delivery System | - Four channel precision gas mixing and delivery system with Touch Screen is included for 1-4 kinds of gasses CVD
- Note: If using flammable gas in the system, It must be placed in a fume hood with the suitable gas detector. You must get approved by professional safety personnel.
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Power | 4 KW Max |
Voltage | 208 - 240V single phase (30 A Breaker required) |
| Warranty & Certificate | One year limited warranty (consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, replacements are available at related products below.) |
| Laptop, software & WiFi Control (Optional) | - Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters operating range.
- Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note: software is only compatible with MTI’s Yudian Temperature Controller
 
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| Compliance | - CE Certified
- NRTL (UL61010) or CSA certification is available at extra cost. （ please click marks below to learn details )
 
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Furnace dimension |
| With Lid Open | With Lid Closed | | Tilt | At 0° | 34° | 0° | 34° | | Length | 60" | 60" | 60" | 60" | | Width | 35" | 35" | 24" | 24" | | Height | 66.5" | 74" | 58" | 68" |
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Net Weight | 130 kg |
Shipping Weight & Dimension | |
Operation Video
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Application Notes | |
Warnings | - The tube furnace with quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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