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BiFeO3 Film on (Pt/Ti/SiO2/Si)
BiFeO3 Film（400nm) on (Pt/Ti/SiO2/Si)， 10x10x0.5mm
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BiFeO3 is a excellent ferro-electric film grown on (Pt/Ti/SiO2/Si) substrate via special spin coating :
- Chemical composition
- BiFeO3
- Growth Method
- Spin coating + Annealing
- Conductive type
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SiO2+Ti+Pt thin film on Si(B-doped) substrate ,
10 x 10 x 0.5 mm, 1sp
( SiO2 = 500 nm, Pt = 200 nm, Ti = 50 nm )
- Resistivity
- < 0.005 ohm.cm
- Film Properties ( click below picture to see details )
- Optional : you may need tool below to handle the wafer
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