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Ba1-xSrxTiO3 Film on (Pt/Ti/SiO2/Si)
Ba1-xSrxTiO3 Film ( 400nm) on (Pt/Ti/SiO2/Si), 10x10x0.5mm
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Ba1-xSrxTiO3 is an excellent enhanced dielectronic film grown on (Pt/Ti/SiO2/Si) substrate via special spin coating :
- Chemical composition
- Ba1-xSrxTiO3
- Growth Method
- Spin coating + Annealing
- Conductive type
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SiO2+Ti+Pt thin film on Si(B-doped) substrate ,
10 x 10 x 0.5 mm,1sp (SiO2 = 500 nm, Pt = 60 nm)
- Resistivity
- < 0.005 ohm.cm
- Film Properties ( click below picture to see details)
- Optional : you may need tool below to handle the wafer
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